3D push-pull heterodyne interferometer for SPM metrology

Kazieva T. V; Gubskiy K. L.; Kuznetsov A. P.; Reshetov V. N.

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3D push-pull heterodyne interferometer for SPM metrology

机译：用于SPM计量的3D推拉外差干涉仪

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A three-coordinate heterodyne laser interferometer has been developed to measure the displacement of the probe microscope scanner with a subnanometer resolution that provides traceability of measurements to the standard of meter through the wavelength of a stabilized He-Ne laser. Main sources of errors are investigated, and their influence is minimized so that the resulting measurement uncertainty of the system does not exceed 0.2 nm, and the resolution is 0.01 nm. The investigation of metrological characteristics of the three-coordinate interferometer was carried out with a scanning probe microscopy (SPM) NanoScan-3D using TGZ-type calibration gratings. The values measured with SPM fell within the 95% confidence interval given by Physikalisch-Technisc.he Bundesanstalt (PTB) (Germany). SPM equipped with a laser interferometer was used to measure the characteristics of dynamic etalons of geometric dimensions. (C) 2019 Optical Society of America

机译：已经开发了一种三坐标外差激光干涉仪以测量探针显微镜扫描仪的亚风速分辨率，该亚速度分辨率可通过稳定的HE-NE激光的波长提供测量标准的可追溯性。研究了主要的误差来源，它们的影响最小化，使得系统的测量不确定度不超过0.2nm，分辨率为0.01nm。使用TGZ型校准光栅用扫描探针显微镜（SPM）纳米型载体进行三坐标干涉仪的计量特性的研究。用SPM测量的值落在Physikalisch-Technic.HE Bundesanstalt（PTB）（德国）给出的95％置信区间内。配备激光干涉仪的SPM用于测量几何尺寸的动态标准元的特性。（c）2019年光学学会

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《Applied optics》 |2019年第15期|共7页
作者
Kazieva T. V; Gubskiy K. L.; Kuznetsov A. P.; Reshetov V. N.;
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Natl Res Nucl Univ MEPhI Moscow Engn Phys Inst Moscow 115409 Russia;

Natl Res Nucl Univ MEPhI Moscow Engn Phys Inst Moscow 115409 Russia;

Natl Res Nucl Univ MEPhI Moscow Engn Phys Inst Moscow 115409 Russia;

Natl Res Nucl Univ MEPhI Moscow Engn Phys Inst Moscow 115409 Russia;

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3D push-pull heterodyne interferometer for SPM metrology

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