Three-degrees-of-freedom laser interferometer based on differential wavefront sensing with wide angular measurement range

Yang Fuzhong; Zhang Ming; Ye Weinan; Wang Leijie

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Three-degrees-of-freedom laser interferometer based on differential wavefront sensing with wide angular measurement range

机译：基于宽角测量范围的差动波前检测三次自由度激光干涉仪

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We present a three-degrees-of-freedom laser interferometer based on differential wavefront sensing with a wide angular measurement range. To obtain measurement signals with a high AC/DC ratio and improve the linearity of differential wavefront sensing in a wide range angular displacement measurement, a fiber bundle instead of a quadrant photodiode is applied to receive the interference light. Meanwhile, a decoupled algorithm with quadratic correction derived by the ray tracing method and kinematic analysis is detailed in the case of the wide range angular displacement. The simulation and experimental results prove that the laser interferometer with the proposed structure could realize hundreds of microradian range of angular displacement measurement, which are expanded in the differential wavefront sensing. (C) 2019 Optical Society of America

机译：我们基于宽角测量范围的差动波前感测，我们介绍了三次自由度激光干涉仪。为了获得具有高AC / DC比率的测量信号，并在宽范围的角度位移测量中提高差动波前感的线性度，施加光纤束代替象限光电二极管以接收干涉光。同时，在宽范围的角位移的情况下，详述了具有由光线跟踪方法和运动学分析的二次校正的解耦算法。模拟和实验结果证明，具有所提出的结构的激光干涉仪可以实现数百微阵的角位移测量范围，其在差动波前感测中膨胀。（c）2019年光学学会

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来源
《Applied optics》 |2019年第3期|共6页
作者
Yang Fuzhong; Zhang Ming; Ye Weinan; Wang Leijie;
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Tsinghua Univ State Key Lab Tribol Dept Mech Engn Beijing 100084 Peoples R China;

Tsinghua Univ State Key Lab Tribol Dept Mech Engn Beijing 100084 Peoples R China;

Tsinghua Univ State Key Lab Tribol Dept Mech Engn Beijing 100084 Peoples R China;

Tsinghua Univ State Key Lab Tribol Dept Mech Engn Beijing 100084 Peoples R China;

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Three-degrees-of-freedom laser interferometer based on differential wavefront sensing with wide angular measurement range

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