Design and realization of antireflection coatings for the visible and the infrared based on mesoporous SiO2 and SiO2-TiO2 hybrid materials

Zhao Wenping; Jia Hongbao; Wang Ying; Wang Qian; Wu Henan; Wang Biao

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Design and realization of antireflection coatings for the visible and the infrared based on mesoporous SiO2 and SiO2-TiO2 hybrid materials

机译：基于介孔SiO2和SiO2-TiO2杂交材料的可见光和红外线抗反射涂层的设计与实现

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Five-layer antireflective coating for the visible and the infrared has been successfully fabricated by a solgel route on quartz substrate. The quarter-half-quarter multilayer structure with two buffer layers is optimized by the optical admittance approach. Mesoporous SiO2 film templated by an ethylene oxide-propylene oxide-ethylene oxide triblock copolymer is used as the top layer, and SiO2-TiO2 hybrid films are employed as the other layers. The grazing incidence small-angle x-ray scattering results indicate the ordered mesopores in the low-index SiO2 film, as well as the homogeneity of the SiO2-TiO2 hybrid films. Transmittance spectra are fitted to obtain film thicknesses and refractive indices, providing the main technological parameters for theory designs. A short heat-treatment step followed by a shock cooling process is introduced to suppress crack formation in film stacks. The transmittance of the obtained five-layer antireflective coating exceeds 99% at 500-700 nm, and the maximum value in the infrared region is 97.84% at 1100 nm. This work is a beneficial attempt to fabricate antireflective coatings with multilayer structure through the soft solgel route. (C) 2019 Optical Society of America

机译：用于可见的五层抗反射涂层，并通过石英底物上的刚素路线成功地制造。具有两个缓冲层的四分之一半季度的多层结构通过光学导纳方法进行了优化。由环氧乙烷 - 环氧乙烷 - 环氧乙烷三嵌段共聚物使用的介孔SiO 2膜用作顶层，并且SiO2-TiO2杂化膜用作其他层。放牧发生率小角X射线散射结果表明低指数SiO 2膜中的有序的中孔，以及SiO2-TiO2混合膜的均匀性。透射谱配合以获得膜厚度和折射率，提供理论设计的主要技术参数。引入了短的热处理步骤，然后引入抗冲冷却过程以抑制薄膜堆叠中的裂缝形成。所得五层抗反射涂层的透射率超过500-700nm的99％，红外区域中的最大值在1100nm下为97.84％。这项工作是一种有益的尝试通过软溶胶途径用多层结构制造抗反射涂层。（c）2019年光学学会

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来源
《Applied optics》 |2019年第9期|共8页
作者
Zhao Wenping; Jia Hongbao; Wang Ying; Wang Qian; Wu Henan; Wang Biao;
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Univ Sci &

Technol Liaoning Sch Sci Anshan 114051 Peoples R China;

Univ Sci &

Technol Liaoning Sch Sci Anshan 114051 Peoples R China;

Univ Sci &

Technol Liaoning Sch Sci Anshan 114051 Peoples R China;

Univ Sci &

Technol Liaoning Sch Sci Anshan 114051 Peoples R China;

Univ Sci &

Technol Liaoning Sch Sci Anshan 114051 Peoples R China;

Univ Sci &

Technol Liaoning Sch Sci Anshan 114051 Peoples R China;

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Design and realization of antireflection coatings for the visible and the infrared based on mesoporous SiO2 and SiO2-TiO2 hybrid materials

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