Non-contact method of thickness measurement for a transparent plate using a laser auto-focus scanning probe

Vo Quangsang; Duan Yiting; Zhang Xiaodong; Fang Fengzhou

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Non-contact method of thickness measurement for a transparent plate using a laser auto-focus scanning probe

机译：使用激光自动聚焦扫描探头的透明板厚度测量的非接触方法

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In this paperwe propose a novel non-contact method of thickness measurement for a transparent plate using a laser auto-focus scanning (LAFS) probe. Through the analysis of the focus error signal (FES) from the actual specimen's upper and lower surface reflectances, a measurement model is introduced to find the best focus position on the corresponding surface of the transparent plate. Thus, the thickness of a specimen can be obtained. Herein, the LAFS probe measurement characteristics by auto-searching the FES method can be analyzed, which can then realize non-contact measurement and focus detection of micro-displacements. Therefore, we have successfully designed a low-cost, high-precision auto-focusing thickness measurement system with linear piezoelectric nano-positioning. To verify the proposed method, some transparent specimens were evaluated, and the thicknesses were rapidly and successfully measured. Experiments confirm the validity of the proposed system, and the results show that the method is effective for the thickness measurement of transparent plates. (C) 2019 Optical Society of America

机译：在本文中，我们使用激光自动聚焦扫描（LAF）探针提出了一种新的非接触方法，用于透明板的透明板的厚度测量。通过从实际样本的上下表面反射的聚焦误差信号（FES）的分析，引入了测量模型，以找到透明板的相应表面上的最佳焦点位置。因此，可以获得样本的厚度。这里，通过自动搜索FES方法的LAFS探针测量特性，然后可以实现非接触式测量和焦点检测。因此，我们已经成功设计了一种具有线性压电纳米定位的低成本，高精度的自动聚焦厚度测量系统。为了验证所提出的方法，评估一些透明标本，迅速且成功地测量厚度。实验证实了所提出的系统的有效性，结果表明该方法对透明板的厚度测量有效。（c）2019年光学学会

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《Applied optics》 |2019年第35期|共8页
作者
Vo Quangsang; Duan Yiting; Zhang Xiaodong; Fang Fengzhou;
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Tianjin Univ Ctr MicroNano Mfg Technol MNMT State Key Lab Precis Measuring Technol &

Instrume Tianjin 300072 Peoples R China;

Tianjin Univ Ctr MicroNano Mfg Technol MNMT State Key Lab Precis Measuring Technol &

Instrume Tianjin 300072 Peoples R China;

Tianjin Univ Ctr MicroNano Mfg Technol MNMT State Key Lab Precis Measuring Technol &

Instrume Tianjin 300072 Peoples R China;

Tianjin Univ Ctr MicroNano Mfg Technol MNMT State Key Lab Precis Measuring Technol &

Instrume Tianjin 300072 Peoples R China;

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Non-contact method of thickness measurement for a transparent plate using a laser auto-focus scanning probe

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