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Relative error in out-of-plane measurement due to the object illumination

机译:由于物体照明导致平面外测量相对误差

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In this work the sensitivity vector is analyzed for collimated and divergent oblique illumination for an out-of-plane arrangement. In the case of collimated illumination, the variation of the sensitivity vector components was considered and a geometric model was proposed for its evaluation. The geometry of the optical setup used allowed us to find sensitivity mostly along the pulling direction; the other two components of the sensitivity vector were relatively small. We measured the displacement induced only along the pulling direction. Errors in the displacement measurement associated with divergent and collimated illumination can be predicted when the sensitivity vector is considered constant. Experimental and theoretical results are presented for the out-of-plane electronic speckle pattern interferometer. The analyzed object was an aluminum plate. (C) 2019 Optical Society of America
机译:在这项工作中,分析灵敏度向量以进行平面外布置的准直和发散的倾斜照明。 在准直照明的情况下,考虑了灵敏度矢量分量的变化,提出了几何模型进行评估。 光学设置的几何形状使我们允许我们在拉动方向上找到灵敏度; 敏感性载体的其他两个组分相对较小。 我们仅测量沿拉动方向引起的位移。 当敏感度向量被认为是恒定的时,可以预测与发散和准直照明相关联的位移测量中的误差。 为平面外电子散斑图案干涉仪提出了实验和理论结果。 分析的物体是铝板。 (c)2019年光学学会

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