Cost-effective mid-infrared micropolarizer fabricated on common silicon by soft nanoimprint lithography

Zeng Xiangwei; Chu Jinkui; Kang Weidong; Wu Qinming; Zhan Ran

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Cost-effective mid-infrared micropolarizer fabricated on common silicon by soft nanoimprint lithography

机译：通过软纳米压印光刻在普通硅中制造的经济高效的中红外微氢化器

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We fabricated a cost-effective mid-IR micropolarizer on a common Si substrate. To improve the transmittance of Si, we performed a double oxidation on the silicon substrate. The SiO2-Si-SiO2 structure improved the transmittance of Si from 54% to 63%-83%. Then, the mid-IR micropolarizer with multidirectional gratings was fabricated using a soft nanoimprint process followed by the thermal evaporation of Al. Experimental measurements showed a transverse magnetic transmittance in the range of 61%-80% at wavelengths of 4-5 mu m, and the extinction ratio was greater than 19 dB. (C) 2019 Optical Society of America

机译：我们在普通的Si衬底上制造了一种经济高效的中红外微聚烯烃。为了改善Si的透射率，我们在硅衬底上进行了双氧化。 SiO2-Si-SiO2结构改善了Si的透射率从54％到63％-83％。然后，使用柔软的纳米压印过程制造具有多向光栅的中红外微氢化器，然后进行Al的热蒸发。实验测量显示在4-5μm波长的61％-80％范围内的横向磁透射率，并且消光比大于19 dB。（c）2019年光学学会

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《Applied optics》 |2019年第15期|共4页
作者
Zeng Xiangwei; Chu Jinkui; Kang Weidong; Wu Qinming; Zhan Ran;
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Dalian Univ Technol Coll Mech Engn Dalian 116024 Peoples R China;

Dalian Univ Technol Coll Mech Engn Dalian 116024 Peoples R China;

Dalian Univ Technol Coll Mech Engn Dalian 116024 Peoples R China;

Dalian Univ Technol Coll Mech Engn Dalian 116024 Peoples R China;

Dalian Univ Technol Coll Mech Engn Dalian 116024 Peoples R China;

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Cost-effective mid-infrared micropolarizer fabricated on common silicon by soft nanoimprint lithography

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