In situ characterization of thermal cleaned surface for preparing superior transmission-mode GaAs photocathodes

Fang Chengwei; Zhang Yijun; Zhang Kaimin; Shi Feng; Jiao Gangcheng; Cheng Hongchang; Dai Qingxin; Zhang Jingzhi

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In situ characterization of thermal cleaned surface for preparing superior transmission-mode GaAs photocathodes

机译：原位表征热清洗表面，用于制备卓越的传输模式GaAs光电阴极

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Considering that it is impractical to utilize in situ surface diagnostic means to determine the surface cleanliness of transmission-mode GaAs photocathodes in the vacuum device manufacturing process, the thermal desorption technique with the aid of the quadrupole mass spectrometer during the thermal deaning process is employed to in situ characterize the thermal cleaned surface. The desorption behaviors for various impurity gases during the thermal cleaning process are analyzed. The experimental results show that the amount of desorbed impurity gases varies due to the different heat treatment temperatures. Through the verification of Cs/O activation and quantum efficiency measurement, it is found that the desorption behaviors of the specific impurity gases including AsH(3)( )and As-2 are crucial to surface cleanliness of transmission-mode GaAs photocathodes, which relate to the final photoemission capability. This simple and reliable criterion provides an effective way to guide the thermal cleaning process of transmission-mode GaAs photocathodes, and the desorption behaviors assist in in situ evaluation of surface cleanliness. (C) 2019 Optical Society of America

机译：考虑到利用原位表面诊断装置是不切实际的，以确定真空器件制造过程中的透射模式GaAs光电阴极的表面清洁度，在热解码过程中借助于四极孔质谱仪的热解吸技术原位表征了热清洗表面。分析了在热清洗过程中各种杂质气体的解吸行为。实验结果表明，解吸的杂质气体量因不同的热处理温度而变化。通过验证CS / O激活和量子效率测量，发现包括灰（3）（）和AS-2的特定杂质气体的解吸行为对于透射模式GaAs光电病的表面清洁度至关重要到最终的光曝光能力。这种简单可靠的标准提供了引导透射模式GaAs光电阴极的热清洗过程的有效方法，并且解吸行为辅助表面清洁度的原位评估。（c）2019年光学学会

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来源
《Applied optics》 |2019年第19期|共7页
作者
Fang Chengwei; Zhang Yijun; Zhang Kaimin; Shi Feng; Jiao Gangcheng; Cheng Hongchang; Dai Qingxin; Zhang Jingzhi;
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作者单位

Nanjing Univ Sci &

Technol Sch Elect &

Opt Engn Nanjing 210094 Jiangsu Peoples R China;

Nanjing Univ Sci &

Technol Sch Elect &

Opt Engn Nanjing 210094 Jiangsu Peoples R China;

Nanjing Univ Sci &

Technol Sch Elect &

Opt Engn Nanjing 210094 Jiangsu Peoples R China;

Sci &

Technol Low Light Level Night Vis Lab Xian 710065 Shaanxi Peoples R China;

Sci &

Technol Low Light Level Night Vis Lab Xian 710065 Shaanxi Peoples R China;

Sci &

Technol Low Light Level Night Vis Lab Xian 710065 Shaanxi Peoples R China;

Nanjing Univ Sci &

Technol Sch Elect &

Opt Engn Nanjing 210094 Jiangsu Peoples R China;

Sci &

Technol Low Light Level Night Vis Lab Xian 710065 Shaanxi Peoples R China;

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In situ characterization of thermal cleaned surface for preparing superior transmission-mode GaAs photocathodes

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