Active lens for thermal aberration compensation in lithography lens

Zhao Lei; Dong Lijian; Yu Xinfeng; Li Pengzhi; Qiao Yanfeng

首页> 外文期刊>Applied optics >Active lens for thermal aberration compensation in lithography lens

【24h】

Active lens for thermal aberration compensation in lithography lens

机译：用于光刻透镜的热像差补偿的有源镜头

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相关主题

摘要

High laser absorption and strong resolution enhancement technology make thermal aberration control of lithography lenses more challenging. We present an active lens that uses four bellows actuators to generate astigmatism (Z5) on the lens surface. The apparatus utilizes optical path difference to compensate the system wavefront. In order to assess the specifications of the compensator, the finite element method and experimental analyses are carried out to obtain and validate the general properties of the apparatus. The results show that the Z5 deformation quantity of lens's upper surface exceeds 600 nm; further, Z5 coefficient accuracy is better than +/- 1 nm. The apparatus can be an efficient compensator for thermal aberration compensation, especially aberration caused by the dipole illumination. (C) 2018 Optical Society of America

机译：高激光吸收和强度分辨率增强技术使光刻镜头的热像差控制更具挑战性。我们提出了一种有源镜头，它使用四个波纹管致动器在镜片表面上产生散光（Z5）。该装置利用光路径来补偿系统波前。为了评估补偿器的规格，进行有限元方法和实验分析以获得和验证装置的一般性质。结果表明，透镜上表面的Z5变形量超过600nm; 此外，Z5系数精度优于+/- 1nm。该装置可以是用于热像差补偿的有效补偿器，尤其是由偶极照明引起的像差。（c）2018年光学学会

著录项

来源
《Applied optics》 |2018年第29期|共10页
作者
Zhao Lei; Dong Lijian; Yu Xinfeng; Li Pengzhi; Qiao Yanfeng;
展开▼
作者单位

Chinese Acad Sci Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

Chinese Acad Sci Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

Chinese Acad Sci Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

Chinese Acad Sci Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

Chinese Acad Sci Changchun Inst Opt Fine Mech &

Phys Changchun 130033 Jilin Peoples R China;

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类应用;
关键词

Active lens for thermal aberration compensation in lithography lens

摘要

著录项

相关主题

期刊订阅