Angular resolved power spectra density analysis for improving mirror manufacturing

Pertermann Tom; Hartung Johannes; Beier Matthias; Trost Marcus; Schroeder Sven; Risse Stefan; Eberhardt Ramona; Tuennermann Andreas; Gross Herbert

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Angular resolved power spectra density analysis for improving mirror manufacturing

机译：改进镜制造的角度分辨功率谱密度分析

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Ultra-precise diamond turning is the method of choice for manufacturing freeform optics. Analyzing surface errors in different spatial frequency ranges has mainly been performed in a one-dimensional representation of the power spectral density function. However, the advanced machine dynamics at the fabrication of freeform mirrors result in highly anisotropic surfaces with regular ripples in different orientations. To properly analyze the entire surface in the frequency regime, a new way of representing the two-dimensional power spectral density is introduced in this paper. This novel tool is utilized for the evaluation of an example freeform mirror. (C) 2018 Optical Society of America

机译：超精密的金刚石转动是制造自由形式光学元件的首选方法。分析不同空间频率范围的表面误差主要是在功率谱密度函数的一维表示中执行的。然而，自由形式镜制造时的先进机器动态导致高度各向异性表面，具有不同取向的常规纹波。为了正确地分析频率调节中的整个表面，本文介绍了代表二维功率谱密度的新方法。这种新颖的工具用于评估示例自由镜。（c）2018年光学学会

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《Applied optics》 |2018年第29期|共7页
作者
Pertermann Tom; Hartung Johannes; Beier Matthias; Trost Marcus; Schroeder Sven; Risse Stefan; Eberhardt Ramona; Tuennermann Andreas; Gross Herbert;
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Fraunhofer Inst Appl Opt &

Precis Engn Albert Einstein Str 7 D-07745 Jena Germany;

Fraunhofer Inst Appl Opt &

Precis Engn Albert Einstein Str 7 D-07745 Jena Germany;

Fraunhofer Inst Appl Opt &

Precis Engn Albert Einstein Str 7 D-07745 Jena Germany;

Fraunhofer Inst Appl Opt &

Precis Engn Albert Einstein Str 7 D-07745 Jena Germany;

Fraunhofer Inst Appl Opt &

Precis Engn Albert Einstein Str 7 D-07745 Jena Germany;

Fraunhofer Inst Appl Opt &

Precis Engn Albert Einstein Str 7 D-07745 Jena Germany;

Fraunhofer Inst Appl Opt &

Precis Engn Albert Einstein Str 7 D-07745 Jena Germany;

Fraunhofer Inst Appl Opt &

Precis Engn Albert Einstein Str 7 D-07745 Jena Germany;

Fraunhofer Inst Appl Opt &

Precis Engn Albert Einstein Str 7 D-07745 Jena Germany;

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Angular resolved power spectra density analysis for improving mirror manufacturing

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