Fabrication of an infrared Shack-Hartmann sensor by combining high-speed single-point diamond milling and precision compression molding processes

Zhang Lin; Zhou Wenchen; Naples Neil J.; Yi Allen Y.

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Fabrication of an infrared Shack-Hartmann sensor by combining high-speed single-point diamond milling and precision compression molding processes

机译：通过组合高速单点金刚石铣削和精密压缩成型工艺来制造红外棚屋传感器

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A novel fabrication method by combining high-speed single-point diamond milling and precision compression molding processes for fabrication of discontinuous freeform microlens arrays was proposed. Compared with slow tool servo diamond broaching, high-speed single-point diamond milling was selected for its flexibility in the fabrication of true 3D optical surfaces with discontinuous features. The advantage of single-point diamond milling is that the surface features can be constructed sequentially by spacing the axes of a virtual spindle at arbitrary positions based on the combination of rotational and translational motions of both the high-speed spindle and linear slides. By employing this method, each micro-lenslet was regarded as a microstructure cell by passing the axis of the virtual spindle through the vertex of each cell. An optimization arithmetic based on minimum-area fabrication was introduced to the machining process to further increase the machining efficiency. After the mold insert was machined, it was employed to replicate the microlens array onto chalcogenide glass. In the ensuing optical measurement, the self-built Shack-Hartmann wavefront sensor was proven to be accurate in detecting an infrared wavefront by both experiments and numerical simulation. The combined results showed that precision compression molding of chalcogenide glasses could be an economic and precision optical fabrication technology for high-volume production of infrared optics. (C) 2018 Optical Society of America

机译：提出了一种新颖的制造方法，通过组合高速单点金刚石铣削和精密压缩成型工艺来制造不连续自由形状微透镜阵列。与慢速工具伺服金刚石拉伸相比，选择了高速单点金刚石铣削，为其制造真正的3D光学表面具有不连续特征的灵活性。单点金刚石铣削的优点是通过基于高速主轴和线性载玻片的旋转和平移运动的组合在任意位置处以任意位置间隔到虚拟主轴的轴线来依次构造表面特征。通过采用该方法，通过通过每个小区的顶点通过虚拟主轴的轴线被视为微观结构单元。基于最小区域制造的优化算法被引入加工过程，以进一步提高加工效率。模具插入件被加工后，使用将微透镜阵列复制到硫属化物玻璃上。在随后的光学测量中，经过证明通过实验和数值模拟来证明自动构建的Shack-Hartmann波前传感器可以准确地检测红外波前。合并的结果表明，硫属化物玻璃的精密压缩成型可以是用于高批量生产红外光学的经济和精密光学制造技术。（c）2018年光学学会

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《Applied optics》 |2018年第13期|共8页
作者
Zhang Lin; Zhou Wenchen; Naples Neil J.; Yi Allen Y.;
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Ohio State Univ Dept Integrated Syst Engn 210 Baker Syst Engn Bldg 1971 Neil Ave Columbus OH 43210 USA;

Ohio State Univ Dept Integrated Syst Engn 210 Baker Syst Engn Bldg 1971 Neil Ave Columbus OH 43210 USA;

Ohio State Univ Dept Integrated Syst Engn 210 Baker Syst Engn Bldg 1971 Neil Ave Columbus OH 43210 USA;

Ohio State Univ Dept Integrated Syst Engn 210 Baker Syst Engn Bldg 1971 Neil Ave Columbus OH 43210 USA;

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Fabrication of an infrared Shack-Hartmann sensor by combining high-speed single-point diamond milling and precision compression molding processes

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