Thin-film-based optical fiber Fabry-Perot interferometer used for humidity sensing

Peng Jiankun; Qu Yapeng; Wang Weijia; Sun Tengpeng; Yang Minghong

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Thin-film-based optical fiber Fabry-Perot interferometer used for humidity sensing

机译：基于薄膜的光纤Fabry-Perot干涉仪用于湿度传感

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A thin-film-based optical fiber Fabry-Perot interferometer that consists of ZrO2 and SiO2 porous thin films is designed and fabricated by electron beam physical vapor deposition. Since the SiO2 porous thin film has the capability of water adsorption, the proposed Fabry-Perot interferometer is appropriate to detect humidity. Experimental results show that the prepared sensor has a humidity detection range from 0.06% RH to 70% RH. A cycling test shows that the humidity sensor has a responding or recover time of 4 s and good repeatability among different humidity environments. Especially, the proposed humidity sensor is insensitive to temperature variation and suitable for the detection of low relative humidity. (C) 2018 Optical Society of America

机译：基于薄膜的光纤法布里 - 珀·珀罗干涉干涉仪，其由ZrO2和SiO 2多孔薄膜组成，通过电子束物理气相沉积设计和制造。由于SiO 2多孔薄膜具有水吸附的能力，所以提出的法布里 - 珀罗干涉仪适当地检测湿度。实验结果表明，制备的传感器的湿度检测范围为0.06％RH至70％RH。循环试验表明，湿度传感器在不同的湿度环境中具有4 s的响应或恢复时间和良好的重复性。特别地，所提出的湿度传感器对温度变化不敏感，适用于检测低相对湿度。（c）2018年光学学会

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来源
《Applied optics》 |2018年第12期|共6页
作者
Peng Jiankun; Qu Yapeng; Wang Weijia; Sun Tengpeng; Yang Minghong;
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Wuhan Univ Technol Natl Engn Lab Fiber Opt Sensing Technol Wuhan 430070 Hubei Peoples R China;

Wuhan Univ Technol Natl Engn Lab Fiber Opt Sensing Technol Wuhan 430070 Hubei Peoples R China;

Wuhan Univ Technol Natl Engn Lab Fiber Opt Sensing Technol Wuhan 430070 Hubei Peoples R China;

Wuhan Univ Technol Natl Engn Lab Fiber Opt Sensing Technol Wuhan 430070 Hubei Peoples R China;

Wuhan Univ Technol Natl Engn Lab Fiber Opt Sensing Technol Wuhan 430070 Hubei Peoples R China;

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Thin-film-based optical fiber Fabry-Perot interferometer used for humidity sensing

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