Spatial phase-shift dual-beam speckle interferometry

Gao Xinya; Yang Lianxiang; Wang Yonghong; Zhang Boyang; Dan Xizuo; Li Junrui; Wu Sijin

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Spatial phase-shift dual-beam speckle interferometry

机译：空间相移双光束斑点干涉测量

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The spatial phase-shift technique has been successfully applied to an out-of-plane speckle interferometry system. Its application to a pure in-plane sensitive system has not been reported yet. This paper presents a novel optical configuration that enables the application of the spatial phase-shift technique to pure in-plane sensitive dual-beam speckle interferometry. The new spatial phase-shift dual-beam speckle interferometry (SPS-DBSP) uses a dual-beam in-plane electronic speckle pattern interferometry configuration with individual aperture shears, avoiding the interference in the object plane by the use of a low-coherence source, and different optical paths. The measured object is illuminated by two incoherent beams that are generated by a delay line, which is larger than the coherence length of the laser. The two beams reflected from the object surface interfere with each other at the CCD plane because of different optical paths. A spatial phase shift is introduced by the angle between the two apertures when they are mapped to the same optical axis. The phase of the in-plane deformation can directly be extracted from the speckle patterns by the Fourier transform method. The capability of SPS-DBSI is demonstrated by theoretical discussion as well as experiments. (C) 2018 Optical Society of America

机译：空间相移技术已成功应用于平面外散斑干涉系统。它尚未报告其在纯平面内敏感系统的应用。本文介绍了一种新型光学配置，使得空间相移技术能够在纯平面内敏感双光束斑点干涉法。新的空间相移双光束散热区（SPS-DBSP）使用双光束内部电子散斑图案干涉式配置与单独的孔径剪切，通过使用低相干源来避免对象平面的干扰和不同的光路。测量的物体由两个不相停的光束照射，该光束由延迟线产生，该延迟线大于激光器的相干长度。由于不同光路，从物表面反射的两个光束在CCD平面上彼此干扰。当它们映射到相同的光轴时，通过两个孔之间的角度引入空间相移。通过傅里叶变换方法可以直接从散斑图案中提取面内变形的相位。通过理论讨论和实验证明了SPS-DBSI的能力。（c）2018年光学学会

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《Applied optics》 |2018年第3期|共6页
作者
Gao Xinya; Yang Lianxiang; Wang Yonghong; Zhang Boyang; Dan Xizuo; Li Junrui; Wu Sijin;
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作者单位

Hefei Univ Technol Sch Instrument Sci &

Optoelect Engn Hefei 230009 Anhui Peoples R China;

Hefei Univ Technol Sch Instrument Sci &

Optoelect Engn Hefei 230009 Anhui Peoples R China;

Hefei Univ Technol Sch Instrument Sci &

Optoelect Engn Hefei 230009 Anhui Peoples R China;

Oakland Univ Dept Mech Engn Rochester NY USA;

Hefei Univ Technol Sch Instrument Sci &

Optoelect Engn Hefei 230009 Anhui Peoples R China;

Oakland Univ Dept Mech Engn Rochester NY USA;

Beijing Informat Sci &

Technol Univ Sch Instruments Sci &

Optoelect Engn Beijing 100192 Peoples R China;

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正文语种 eng
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Spatial phase-shift dual-beam speckle interferometry

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