Arbitrary trapezoidal illumination generation method based on variable slits for optical lithography

Lin Dongliang; Zhang Fang; Cheng Weilin; Huang Huijie

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Arbitrary trapezoidal illumination generation method based on variable slits for optical lithography

机译：基于光学光刻变速的任意梯形照明发电方法

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Trapezoidal illumination is an effective approach to improve the integrated uniformity of light intensity in a step-and-scan lithographic system. When different laser pulses are utilized, the optimal trapezoidal illumination varies. In addition, if the coherence factor takes different values, the outline of the trapezoidal illumination varies as well, directly affecting the integrated uniformity of light intensity. To reduce the impact of variations in trapezoidal illumination, a newly designed method for generating arbitrary trapezoidal illuminations using variable slits is proposed. The performance of our method after adjusting the trapezoidal outline for different coherence factors in different illumination modes was verified through optical simulations. Compared to the traditional method, the proposed strategy to realize arbitrary trapezoidal illuminations based on variable slits can obtain the best outlines for illumination, calculated by balancing pulse quantization error and energy losses. Furthermore, when different coherence factors are applied, the outline of the generated trapezoidal illumination can always be maintained by simply moving the blades an appropriate distance. (C) 2018 Optical Society of America

机译：梯形照明是一种有效的方法，可以提高阶梯和扫描光刻系统中的光强度的综合均匀性。当使用不同的激光脉冲时，最佳梯形照明变化。另外，如果相干因子采用不同的值，则梯形照明的轮廓也变化，直接影响光强度的综合均匀性。为了减少梯形照射变化的影响，提出了一种使用可变狭缝产生任意梯形照明的新设计方法。通过光学模拟验证了在调整不同照明模式中不同相干因子的梯形轮廓后的方法的性能。与传统方法相比，通过平衡脉冲量化误差和能量损耗来计算基于可变狭缝的任意梯形照射的所提出的策略，可以获得用于照明的最佳纲要。此外，当应用不同的相干因子时，可以通过简单地移动叶片适当的距离来保持所产生的梯形照明的轮廓。（c）2018年光学学会

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来源
《Applied optics》 |2018年第11期|共8页
作者
Lin Dongliang; Zhang Fang; Cheng Weilin; Huang Huijie;
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Chinese Acad Sci Shanghai Inst Opt &

Fine Mech Lab Informat Opt &

Optoelect Technol Shanghai 201800 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech Lab Informat Opt &

Optoelect Technol Shanghai 201800 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech Lab Informat Opt &

Optoelect Technol Shanghai 201800 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech Lab Informat Opt &

Optoelect Technol Shanghai 201800 Peoples R China;

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Arbitrary trapezoidal illumination generation method based on variable slits for optical lithography

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