Five-step phase-shifting white-light interferometry for the measurement of fiber optic extrinsic Fabry-Perot interferometers

Gao Hongchun; Jiang Yi; Zhang Liuchao; Jiang Lan

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Five-step phase-shifting white-light interferometry for the measurement of fiber optic extrinsic Fabry-Perot interferometers

机译：用于测量光纤外部法布里 - 珀罗干涉仪的五步相移白光干涉测量

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Five-step phase-shifting white-light interferometry is presented for interrogating the absolute cavity length of the fiber optic extrinsic Fabry-Perot interferometer (EFPI). It combines ideas of phase-shifting interferometry and white-light interferometry (WLI) to extend the measurement range of fiber optic WLI. Five sub-interferograms intercepted from the white-light optical spectrum are used to recover the optical path difference (OPD) of the EFPI. This method is demonstrated to interrogate a wider range of OPD. The experimental results show that the measurement resolution ranges from 0.5 mu m to 5 mu m with cavity length ranges from 16 mu m to 12,402 mu m, and it has a great advantage in measuring EFPIs with short cavity lengths. (C) 2018 Optical Society of America.

机译：提出了五步相移白光干涉测量，用于询问光纤外部法布里 - 珀罗干涉仪（EFPI）的绝对腔长度。它结合了相移干涉测量和白光干涉测量（WLI）的思想来扩展光纤WLI的测量范围。从白光光谱截取的五个子干扰图用于恢复EFPI的光路径（OPD）。该方法被证明是为了询问更广泛的OPD。实验结果表明，测量分辨率为0.5μm至5μm，腔长范围为16μm至12,402μm，并且在测量具有短腔长度的EFPIS方面具有很大的优势。（c）2018年光学学会。

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来源
《Applied optics》 |2018年第5期|共6页
作者
Gao Hongchun; Jiang Yi; Zhang Liuchao; Jiang Lan;
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Beijing Inst Technol Sch Optoelect Beijing 100081 Peoples R China;

Beijing Inst Technol Sch Optoelect Beijing 100081 Peoples R China;

Beijing Inst Technol Sch Optoelect Beijing 100081 Peoples R China;

Beijing Inst Technol Laser Micro Nano Fabricat Lab Beijing 100081 Peoples R China;

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正文语种 eng
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Five-step phase-shifting white-light interferometry for the measurement of fiber optic extrinsic Fabry-Perot interferometers

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