Simple method for volumetric thickness measurement using a color camera

Choi Garam; Lee Yoonhyuk; Lee Seung Woo; Cho Yeongchan; Pahk Heui Jae

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Simple method for volumetric thickness measurement using a color camera

机译：使用彩色相机的体积厚度测量的简单方法

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A simple volumetric thickness measurement method for in-line high-speed inspection is proposed. With a color camera alone, spectrally resolved reflectance in a spatial domain is obtained: a Bayer filter spectrally resolves the reflected signal, and a CMOS sensor acquires three multi-spectral reflectances from RGB data at a single shot. To determine an accurate thickness, a modified reflectance is derived to convert a conventional spectral reflectance throughout a wavelength domain into an adequate form in an RGB domain by considering the characteristics of wide-band multi-spectral acquisition. The proposed method is validated by the measurement of a uniformly deposited SiO2 film and a tapered SiNx film. (C) 2018 Optical Society of America

机译：提出了一种简单的体积厚度测量方法，用于在线高速检查。仅获得彩色相机，获得空间域中的光谱分辨反射率：拜耳滤波器频谱解析反射信号，并且CMOS传感器在单个射击时从RGB数据获取三个多光谱反射。为了确定精确的厚度，通过考虑宽带多光谱采集的特性，导出修改的反射率以将在波长域中的传统光谱反射在RGB域中的适当形式转换为足够的形式。通过测量均匀沉积的SiO 2膜和锥形SINX膜来验证所提出的方法。（c）2018年光学学会

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来源
《Applied optics》 |2018年第26期|共9页
作者
Choi Garam; Lee Yoonhyuk; Lee Seung Woo; Cho Yeongchan; Pahk Heui Jae;
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Seoul Natl Univ Sch Mech &

Aerosp Engn Gwanak Ro 1 Seoul 151742 South Korea;

Vieworks Burim Ro 170beon Gil Anyang 413 Gyeonggi Do South Korea;

Seoul Natl Univ Sch Mech &

Aerosp Engn Gwanak Ro 1 Seoul 151742 South Korea;

Seoul Natl Univ Sch Mech &

Aerosp Engn Gwanak Ro 1 Seoul 151742 South Korea;

Seoul Natl Univ Sch Mech &

Aerosp Engn Gwanak Ro 1 Seoul 151742 South Korea;

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Simple method for volumetric thickness measurement using a color camera

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