Laboratory demonstration of a cryogenic deformable mirror for wavefront correction of space-borne infrared telescopes

Takahashi Aoi; Enya Keigo; Haze Kanae; Kataza Hirokazu; Kotani Takayuki; Matsuhara Hideo; Kamiya Tomohiro; Yamamuro Tomoyasu; Bierden Paul; Cornelissen Steven; Lam Charlie; Feinberg Michael

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Laboratory demonstration of a cryogenic deformable mirror for wavefront correction of space-borne infrared telescopes

机译：用于波前矫正空间红外望远镜的低温可变形镜的实验室示范

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This paper demonstrates a cryogenic deformable mirror (DM) with 1020 actuators based on micro-electrical mechanical systems (MEMS) technology. Cryogenic space-borne infrared telescopes can experience a wavefront error due to a figure error of their mirror surface, which makes the imaging performance worse. For on-orbit wavefront correction as one solution, we developed aMEMS-processed electro-static DM with a special surrounding structure for use under the cryogenic temperature. We conducted a laboratory demonstration of its operation in three cooling cycles between 5 K and 295 K. Using a laser interferometer, we detected the deformation corresponding to the applied voltages under the cryogenic temperature for the first time. The relationship between voltages and displacements was qualitatively expressed by the quadratic function, which is assumed based on the principle of electro-static DMs. We also found that it had a high operating repeatability of a few nm root-meansquare and no significant hysteresis. Using the measured values of repeatability, we simulated the improvement of the point spread function (PSF) by wavefront correction with our DM. These results show that our developed DM is effective in improving imaging performance and PSF contrast of space-borne infrared telescopes. (C) 2017 Optical Society of America

机译：本文演示了一种基于微电机系统（MEMS）技术的1020执行器的低温可变形镜（DM）。低温空间的红外线望远镜由于镜面表面的误差，可能会遇到波前误差，这使得成像性能更糟。对于作为一种解决方案的轨道上的波前校正，我们开发了AMEMS处理的电静电DM，具有特殊的周围结构，用于低温温度。我们在5 k和295k之间的三个冷却循环中进行了实验室演示。使用激光干涉仪，我们首次检测到对应于低温温度下的施加电压的变形。电压和位移之间的关系由二次函数定性地表示，这是基于电静电DMS的原理来假设的。我们还发现，它具有几个NM根径的高效可重复性，并且没有显着的滞后。使用测量的重复性值，我们通过DM模拟了波前校正的点传播功能（PSF）的改进。这些结果表明，我们开发的DM在提高空间红外望远镜的成像性能和PSF对比方面是有效的。（c）2017年光学学会

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《Applied optics》 |2017年第23期|共15页
作者
Takahashi Aoi; Enya Keigo; Haze Kanae; Kataza Hirokazu; Kotani Takayuki; Matsuhara Hideo; Kamiya Tomohiro; Yamamuro Tomoyasu; Bierden Paul; Cornelissen Steven; Lam Charlie; Feinberg Michael;
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Grad Univ Adv Studies SOKENDAI Dept Space &

Astronaut Sci Hayama Kanagawa 2400193 Japan;

Grad Univ Adv Studies SOKENDAI Dept Space &

Astronaut Sci Hayama Kanagawa 2400193 Japan;

Japan Aerosp Explorat Agcy Tokyo Off Chiyoda Ku 4-6 Kandasurugadai Tokyo 1018008 Japan;

Japan Aerosp Explorat Agcy Inst Space &

Astronaut Sci Chuo Ku 3-1-1 Yoshinodai Sagamihara Kanagawa 2525210 Japan;

Natl Astron Observ Japan Extrasolar Planet Detect Project Off 2-21-1 Osawa Mitaka Tokyo 1818588 Japan;

Grad Univ Adv Studies SOKENDAI Dept Space &

Astronaut Sci Hayama Kanagawa 2400193 Japan;

Japan Aerosp Explorat Agcy Tsukuba Space Ctr 2-1-1 Sengen Tsukuba Ibaraki 3058505 Japan;

OptCraft Midori Ku 3-16-8 Higashi Hashimoto Sagamihara Kanagawa 2520144 Japan;

Boston Micromachines Corp 30 Spinelli Pl Cambridge MA 02138 USA;

Boston Micromachines Corp 30 Spinelli Pl Cambridge MA 02138 USA;

Boston Micromachines Corp 30 Spinelli Pl Cambridge MA 02138 USA;

Boston Micromachines Corp 30 Spinelli Pl Cambridge MA 02138 USA;

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Laboratory demonstration of a cryogenic deformable mirror for wavefront correction of space-borne infrared telescopes

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