Edge effect correction using ion beam figuring

Yang Bing; Xie Xuhui; Li Furen; Zhou Lin

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Edge effect correction using ion beam figuring

机译：边缘效应校正使用离子束图

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The edge effect is regarded as one of the most difficult technical issues for fabricating large primary mirrors, as it can greatly reduce the key performance of the optical system. Ion beam figuring (IBF) has the advantage of no edge effect, so we can use it to remove high points on the edge and improve surface accuracy. The edge local correction method (ELCM) of IBF processes only the surface edge zone, and is very different from the current full caliber figuring method (FCFM). Therefore, it is necessary to study the ELCM of IBF. In this paper, the key factors of ELCM are analyzed, such as dwell time algorithm, edge data extension methods, and the outward dimension of the starting figuring point. At the same time, the distinctions between ELCM and FCFM are compared. Finally, a 142 mm diameter fused silica mirror is fabricated to verify the validity of the theoretical of ELCM. The experimental results indicate that the figuring precision and efficiency can be obviously improved by ELCM. (C) 2017 Optical Society of America

机译：边缘效应被认为是制造大型主镜的最困难的技术问题之一，因为它可以大大降低光学系统的关键性能。离子束图（IBF）具有无边缘效应的优点，因此我们可以使用它来消除边缘上的高点并提高表面精度。 IBF的边缘局部校正方法（ELCM）仅处理表面边缘区域，并且与当前全息型覆盖方法（FCFM）非常不同。因此，有必要研究IBF的ELCM。在本文中，分析了ELCM的关键因素，例如停留时间算法，边缘数据扩展方法和起始图的外部维度。同时，比较ELCM和FCFM之间的区别。最后，制造了142毫米直径的熔融石英镜以验证ELCM的理论的有效性。实验结果表明，ELCM可以明显改善预测精度和效率。（c）2017年光学学会

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《Applied optics》 |2017年第32期|共9页
作者
Yang Bing; Xie Xuhui; Li Furen; Zhou Lin;
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Natl Univ Def Technol Coll Mechatron Engn &

Automat Changsha 410073 Hunan Peoples R China;

Natl Univ Def Technol Coll Mechatron Engn &

Automat Changsha 410073 Hunan Peoples R China;

Natl Univ Def Technol Coll Mechatron Engn &

Automat Changsha 410073 Hunan Peoples R China;

Natl Univ Def Technol Coll Mechatron Engn &

Automat Changsha 410073 Hunan Peoples R China;

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Edge effect correction using ion beam figuring

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