An empirical extension to the multioscillator model has been deduced. In order to comply with inhomogeneous line broadening, we have developed a novel approach based on the application of the beta distribution of single oscillators called the (beta_do) model. The new model has been successfully applied in the course of optical constants determination from photometric measurements of single dielectric, amorphous semiconductor, metal, and organic layers. Thereby, the number of required model parameters can be significantly reduced when compared with the multioscillator model, while the Kramers-Kronig consistency remains guaranteed. (c) 2017 Optical Society of America
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