Characterization of the ionization process inside a miniature glow-discharge micropump

T.GRZEBYK; A.GORECKA-DRZAZGA

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Characterization of the ionization process inside a miniature glow-discharge micropump

机译：微型辉光放电微泵内部电离过程的表征

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The article presents a detailed characterization of the ionization process taking place inside a miniature MEMS-type ion-sorption vacuum pump,based on the Penning pump architecture.Influence of a variety of parameters on the discharge current has been investigated.These include: magnetic field,type of material used for the electrodes as well as horizontal and vertical dimensions of the micropump.It was found that the micropump works efficiently as long as the magnetic field is higher than 0.3 T,and the pumping cell's dimensions exceed lxlxl mm3.Best results have been obtained for copper and aluminum cathodes and low resistivity silicon anodes.

机译：本文基于潘宁泵结构，详细描述了微型MEMS型离子吸附真空泵内发生的电离过程。研究了各种参数对放电电流的影响。其中包括：磁场、用于电极的材料类型以及微泵的水平和垂直尺寸。研究发现，只要磁场大于0.3t，并且泵浦光电池的尺寸超过lxl-mm3，微泵就可以有效地工作。对于铜和铝阴极以及低电阻率硅阳极，已获得最佳结果。

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《Bulletin of the Polish Academy of Sciences. Technical Sciences》 |2018年第2期|共6页
作者
T.GRZEBYK; A.GORECKA-DRZAZGA;
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作者单位

Wroclaw University of Science and Technology Faculty of Microsystem Electronics and Photonics 11/17 Janiszewskiego Str..50-372 Wroclaw Poland;

Wroclaw University of Science and Technology Faculty of Microsystem Electronics and Photonics 11/17 Janiszewskiego Str..50-372 Wroclaw Poland;

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原文格式 PDF
正文语种 eng
中图分类一般工业技术;年鉴、年刊;
关键词
ion-sorption micropump; MEMS-type micropump; gas discharge; ionization;

机译：离子吸附微泵;MEMS型微泵;气体放电;电离;

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Characterization of the ionization process inside a miniature glow-discharge micropump

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