Inkjet 3D printing-towards new micromachining tool for MEMS fabrication

R.WALCZAK

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Inkjet 3D printing-towards new micromachining tool for MEMS fabrication

机译：喷墨3D打印用于MEMS制造的新微机械工具

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Three-dimensional(3D)printing has the potential to transform science and technology by creating bespoke,low-cost appliances that previously required dedicated facilities in order to be made.An attractive and promising research field comes in the form of using 3D printing to create MEMS,including microfluidic structures.In this paper,a discussion on applicability of inkjet 3D printing(i3Dp)for MEMS fabrication is presented on the base of works carried out by a team led by the author.

机译：三维（3D）打印有潜力通过创造定制的、低成本的设备来改变科学和技术，这些设备以前需要专用设施才能制造。一个有吸引力且有前途的研究领域是使用3D打印来创建MEMS，包括微流控结构。本文在作者领导的团队的工作基础上，讨论了喷墨3D打印（i3Dp）在MEMS制造中的适用性。

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《Bulletin of the Polish Academy of Sciences. Technical Sciences》 |2018年第2期|共8页
作者
R.WALCZAK;
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作者单位

Wroclaw University of Science and Technology Faculty of Microsystems Electronics and Photonics Janiszewskiego Str.11/17 50-372 Wroclaw Poland;

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原文格式 PDF
正文语种 eng
中图分类一般工业技术;年鉴、年刊;
关键词
inkjet 3D printing; MEMS; micromachining; lab-on-a-chip;

机译：喷墨3D打印;MEMS;微机械线;芯片实验室;

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3. Analysis of the current density characteristics in through-mask electrochemical micromachining (TMEMM) for fabrication of micro-hole arrays on invar alloy film [J] . Da-som JIN, Kwang-ho CHUN, Eun-sang LEE 中国航空学报（英文版） . 2017,第003期
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9. Design and fabrication of piezoelectric micro generator using laser micromachining and MEMS technique. [D] . Kim, HyunUk. 2008

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Inkjet 3D printing-towards new micromachining tool for MEMS fabrication

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