Wafer-scale single crystals: crystal growth mechanisms, fabrication methods, and functional applications

Ding Changshuai; Jia Hanyu; Sun Qingqing; Yao Zhiqiang; Yang Huige; Liu Wentao; Pang Xinchang; Li Shisheng; Liu Chuan; Minari Takeo; Chen Jinzhou; Liu Xuying; Song Yanlin

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Wafer-scale single crystals: crystal growth mechanisms, fabrication methods, and functional applications

机译：晶圆级单晶：晶体生长机制，制造方法和功能应用

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Wafer-scale single crystals, by virtue of their intrinsically high crystallinity and compatibility on a wafer-scale processing size, have been extensively studied and applied in various electronics and optoelectronics. In this review, we present relevant challenging issues on controllable preparation, additive patterning, and heterogeneous integration of functional single crystals with uniform morphology and unitary crystallographic orientation at the wafer scale. Furthermore, substantial efforts on wafer-scale fabrication of single-crystal films (or isolated single-crystal arrays) through innovative growth strategies are summarized, especially highlighting the impact of nucleation and the growth kinetics on crystal formation. We also outline the distinctive characteristics of single-crystal organic semiconductors, perovskites, and 2D semiconductors, rendering their various (opto)electronic applications. Finally, we discuss potential problems and the outlook of promising research directions of wafer-scale single crystals and their devices for next-generation (opto)electronics.

机译：晶圆级单晶由于其固有的高结晶度和在晶圆级加工尺寸上的兼容性，已被广泛研究并应用于各种电子和光电子领域。在这篇综述中，我们提出了在晶圆尺度上具有均匀形貌和单一晶体学取向的功能单晶的可控制备、加性图案化和异质集成的相关挑战性问题。此外，还总结了通过创新的生长策略在晶圆级制备单晶薄膜（或孤立的单晶阵列）方面所做的大量工作，特别强调了成核和生长动力学对晶体形成的影响。我们还概述了单晶有机半导体、钙钛矿和2D半导体的独特特性，介绍了它们的各种（光电）应用。最后，我们讨论了下一代（光电）电子学用晶圆级单晶及其器件的潜在问题和前景。

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来源
《Journal of Materials Chemistry, C. materials for optical and electronic devices》 |2021年第25期|共23页
作者
Ding Changshuai; Jia Hanyu; Sun Qingqing; Yao Zhiqiang; Yang Huige; Liu Wentao; Pang Xinchang; Li Shisheng; Liu Chuan; Minari Takeo; Chen Jinzhou; Liu Xuying; Song Yanlin;
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作者单位

Zhengzhou Univ Henan Key Lab Adv Nylon Mat &

Applicat Sch Mat Sci &

Engn Key Lab Mat Proc &

Mold Minist Educ Zhengzhou 450001 Peoples R China;

Zhengzhou Univ Henan Key Lab Adv Nylon Mat &

Applicat Sch Mat Sci &

Engn Key Lab Mat Proc &

Mold Minist Educ Zhengzhou 450001 Peoples R China;

Zhengzhou Univ Henan Key Lab Adv Nylon Mat &

Applicat Sch Mat Sci &

Engn Key Lab Mat Proc &

Mold Minist Educ Zhengzhou 450001 Peoples R China;

Zhengzhou Univ Henan Key Lab Adv Nylon Mat &

Applicat Sch Mat Sci &

Engn Key Lab Mat Proc &

Mold Minist Educ Zhengzhou 450001 Peoples R China;

Zhengzhou Univ Henan Key Lab Adv Nylon Mat &

Applicat Sch Mat Sci &

Engn Key Lab Mat Proc &

Mold Minist Educ Zhengzhou 450001 Peoples R China;

Zhengzhou Univ Henan Key Lab Adv Nylon Mat &

Applicat Sch Mat Sci &

Engn Key Lab Mat Proc &

Mold Minist Educ Zhengzhou 450001 Peoples R China;

Zhengzhou Univ Henan Key Lab Adv Nylon Mat &

Applicat Sch Mat Sci &

Engn Key Lab Mat Proc &

Mold Minist Educ Zhengzhou 450001 Peoples R China;

Natl Inst Mat Sci NIMS Res Ctr Funct Mat Tsukuba Ibaraki 3050044 Japan;

Sun Yat Sen Univ State Key Lab Optoelect Mat &

Technol Guangdong P Key Lab Display Mat &

Technol Sch Elect &

Informa Guangzhou 510275 Guangdong Peoples R China;

Natl Inst Mat Sci NIMS Res Ctr Funct Mat Tsukuba Ibaraki 3050044 Japan;

Zhengzhou Univ Henan Key Lab Adv Nylon Mat &

Applicat Sch Mat Sci &

Engn Key Lab Mat Proc &

Mold Minist Educ Zhengzhou 450001 Peoples R China;

Zhengzhou Univ Henan Key Lab Adv Nylon Mat &

Applicat Sch Mat Sci &

Engn Key Lab Mat Proc &

Mold Minist Educ Zhengzhou 450001 Peoples R China;

Chinese Acad Sci Inst Chem Key Lab Green Printing Zhongguancun North First St 2 Beijing 100190 Peoples R China;

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中图分类物理化学（理论化学）、化学物理学;
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2. Rapid Growth of Halide Perovskite Single Crystals: From Methods to Optimization Control [J] . Yu-Ling Wang, Shuai Chang, Xiao-Mei Chen, 中国化学（英文版） . 2019,第006期
3. Wafer-scale single-crystal perovskite patterned thin films based on geometrically-confined lateral crystal growth [J] . Lynn Lee, Jangmi Baek, Kyung Sun Park, Nature Communications . 2017,第1期

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4. Growth mechanism of YAG single crystal in planar waveguide by solid-state crystal growth method [J] . Zhang Ge, Jiang Benxe, Zhang Pande, CERAMICS INTERNATIONAL . 2018,第15期

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5. Growth mechanism and enhanced electrical properties of K0.5Na0.5NbO3-based lead-free piezoelectric single crystals grown by a solid-state crystal growth method [J] . Yang Jie, Yang Qunbao, Li Yongxiang, Journal of the European Ceramic Society . 2016,第3期

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6. Mechanisms of epitaxial growth of SiC films by the method of atom substitution on the surfaces (100) and (111) of Si single crystals and on surfaces of Si films grown on single crystals Al2O3 [C] . S A Kukushkin, A V Osipov International Conference on Vacuum Technique and Technology . 2018

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7. Three-dimensional fabrication of functional single crystal waveguides inside glass by femtosecond laser irradiation [D] . Stone, Adam. 2014

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8. Wafer-scale single-crystal perovskite patterned thin films based on geometrically-confined lateral crystal growth [O] . Lynn Lee, Jangmi Baek, Kyung Sun Park, -1

机译：晶圆级单晶钙钛矿图案化薄膜基于几何约束的横向晶体生长
9. Wafer-scale single-crystal perovskite patterned thin films based on geometrically-confined lateral crystal growth [O] . Lynn Lee, Jangmi Baek, Kyung Sun Park, 2017

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10. Fabrication and Properties of Tungsten Single Crystals. Part I. Growth of Single Crystal Tungsten to Be Used for Rolling into Single Crystal Sheet. Part II. Rolled Single Crystal Tungsten Sheet [R] . Edwards, G. W., Arthur, J. W. 1965

机译：钨单晶的制备与性能。第一部分单晶钨的生长用于轧制单晶板。第二部分。卷式单晶钨板

Wafer-scale single crystals: crystal growth mechanisms, fabrication methods, and functional applications

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