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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >A hybrid modeling framework for the investigation of surface roughening of polymers during oxygen plasma etching
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A hybrid modeling framework for the investigation of surface roughening of polymers during oxygen plasma etching

机译：氧等离子体蚀刻中聚合物表面粗糙化研究的混合建模框架

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Oxygen and oxygen-containing plasmas offer great potential for the surface functionalization of polymeric substrates: thermal reactive neutral species are combined with high energy ions to alter both the micro/nanomorphology and composition of polymeric surfaces in a dry process. Although plasma processing is an attractive option for polymer surface modification, plasma-surface interactions are complex and the process design is usually based on a trial-and-error procedure. Toward a comprehensive process design, a hybrid modeling framework, addressing both effects of plasmas on polymeric surfaces, is developed and applied to an investigation of the oxygen-plasma-induced surface roughening of poly(methyl methacrylate). A kinetic Monte Carlo surface model, considering the synergy of neutral species and ions, is used for the calculation of the local etching rate. The novel element of the model is that it takes into account the surface morphology through the calculation of the trajectories of the species joining the surface reactions. The local etching rate is utilized by a profile evolution module based on the level set method to predict the surface roughness evolution. A method for tracking the local variables of the evolving surface profile (e.g. surface coverage), treating a fundamental weakness of the level set method, is proposed and used to effectively reduce the computational time. The results of the framework are validated by comparison to a theoretical model. The prediction of roughness evolution is consistent with measurements vs time and at different operating conditions. The potential of the framework to additionally handle the chemical composition (oxidation) of the surface is demonstrated, enabling the study of the wetting behavior of plasma-etched polymeric surfaces.
机译：氧和含氧等离子体为聚合物基底的表面功能化提供了巨大的潜力：热反应中性物种与高能离子结合，在干燥过程中改变聚合物表面的微/纳米形态和组成。尽管等离子体处理是聚合物表面改性的一个有吸引力的选择，但等离子体与表面的相互作用是复杂的，工艺设计通常基于试错程序。为了综合工艺设计，开发了一个混合建模框架，解决了等离子体对聚合物表面的影响，并将其应用于研究氧等离子体诱导的聚甲基丙烯酸甲酯表面粗糙化。考虑到中性物种和离子的协同作用，采用动力学蒙特卡罗表面模型计算局部腐蚀速率。该模型的新颖之处在于，它通过计算加入表面反应的物种的轨迹来考虑表面形态。基于水平集方法的轮廓演化模块利用局部刻蚀速率来预测表面粗糙度演化。针对水平集方法的一个基本缺陷，提出了一种跟踪演化表面轮廓局部变量（如表面覆盖率）的方法，有效地减少了计算时间。通过与理论模型的比较，验证了该框架的结果。粗糙度演变的预测与测量值、时间和不同操作条件下的结果一致。该框架还可以处理表面的化学成分（氧化），从而研究等离子体蚀刻聚合物表面的润湿行为。

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