Gas-phase Clusterization of Zinc during Magnetron Sputtering

Abduev A. Kh.; Akhmedov A. K.; Asvarov A. Sh.; Alikhanov N. M. -R.; Emirov R. M.; Muslimov A. E.; Belyaev V. V.

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Gas-phase Clusterization of Zinc during Magnetron Sputtering

机译：磁控溅射期间锌的气相聚集体

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The processes of gas-phase clusterization of zinc during dc magnetron sputtering of a zinc target in an argon atmosphere have been investigated. The influence of the working gas pressure and magnetron discharge current on the morphology and structure of the precipitates formed on substrates previously cooled to-50A degrees D is studied. It is shown that dense textured (002)Zn layers with a columnar structure are formed at relatively low argon pressures in the chamber (P = 0.5 Pa) and low discharge currents (100 mA). X-ray amorphous deposits with a fractal coral-like structure arise on substrates at an extremely high argon pressure in the chamber (P = 5 Pa). An increase in the magnetron discharge current at an operating gas pressure of 5 Pa leads to the formation of polycrystalline layers on substrates; the intensity of the XRD peaks related to crystalline zinc increases with an increase in the discharge current. Possible mechanisms of the structural transformation of Zn deposits are considered.

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《Crystallography reports》 |2017年第1期|共6页
作者
Abduev A. Kh.; Akhmedov A. K.; Asvarov A. Sh.; Alikhanov N. M. -R.; Emirov R. M.; Muslimov A. E.; Belyaev V. V.;
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Russian Acad Sci Inst Phys Dagestan Sci Ctr Makhachkala 367003 Russia;

Russian Acad Sci Inst Phys Dagestan Sci Ctr Makhachkala 367003 Russia;

Russian Acad Sci Inst Phys Dagestan Sci Ctr Makhachkala 367003 Russia;

Dagestan State Univ Makhachkala 367000 Dagestan Russia;

Dagestan State Univ Makhachkala 367000 Dagestan Russia;

Russian Acad Sci Fed Sci Res Ctr Crystallog &

Photon Shubnikov Inst Crystallog Moscow 119333 Russia;

Moscow Reg State Univ Moscow 105005 Russia;

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正文语种 eng
中图分类晶体学;
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机译：磁控溅射期间锌的气相聚集体
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Gas-phase Clusterization of Zinc during Magnetron Sputtering

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