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首页> 外文期刊>Plasma Sources Science & Technology >The role of the metastable O-2(b(1)Sigma(+)(g)) and energy-dependent secondary electron emission yields in capacitively coupled oxygen discharges
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The role of the metastable O-2(b(1)Sigma(+)(g)) and energy-dependent secondary electron emission yields in capacitively coupled oxygen discharges

机译：亚稳的O-2（B（1）Σ（+）（+）（g））和电容耦合氧气排放的能量依赖性二次电子发射产生的作用

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The effects of including the singlet metastable molecule O-2(b(1)Sigma(+)(g)) in the discharge model of a capacitively coupled rf driven oxygen discharge are explored. We furthermore examine the addition of energy-dependent secondary electron emission yields from the electrodes to the discharge model. The one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 is used for this purpose, with the oxygen discharge model considering the species O-2(X-3 Sigma(-)(g)), O-2(a(1)Delta(g)), O-2(b(1)Sigma(+)(g)), O(P-3), O(D-1), O-2(+), O+, O-, and electrons. The effects on particle density profiles, the electron heating rate profile, the electron energy probability function and the sheath width are explored including and excluding the metastable oxygen molecules and secondary electron emission. Earlier we have demonstrated that adding the metastable O-2(a(1)Delta(g)) to the discharge model changes the electron heating from having contributions from both bulk and sheath heating to being dominated by sheath heating for pressures above 50 mTorr. We find that including the metastable O-2(b(1)Sigma(+)(g)) further decreases the ohmic heating and the effective electron temperature in the bulk region. The effective electron temperature in the electronegative core is found to be less than 1 eV in the pressure range 50-200 mTorr which agrees with recent experimental findings. Furthermore, we find that including an energy-dependent secondary electron emission yield for O-2(+)-ions has a significant influence on the discharge properties, including decreased sheath width.
机译：探讨了在电容耦合射频驱动氧放电模型中加入单线态亚稳分子O-2（b（1）σ（+）（g））的影响。此外，我们还研究了从电极到放电模型的与能量相关的二次电子发射产额的增加。为此，使用了一维面向对象的细胞内粒子蒙特卡罗碰撞代码oopd1，氧放电模型考虑了物种O-2（X-3σ（-）（g））、O-2（a（1）δ（g））、O-2（b（1）σ（+）（g））、O（P-3）、O（D-1）、O-2（+）、O+、O-和电子。研究了亚稳氧分子和二次电子发射对粒子密度分布、电子加热速率分布、电子能量概率函数和鞘层宽度的影响。前面我们已经证明，在放电模型中加入亚稳O-2（a（1）Delta（g）），会改变电子加热，使其在50 mTorr以上的压力下，从具有体积和鞘层加热的贡献转变为以鞘层加热为主。我们发现，加入亚稳O-2（b（1）σ（+）（g））进一步降低了体区的欧姆加热和有效电子温度。在50-200 mTorr的压力范围内，电负性磁芯中的有效电子温度小于1 eV，这与最近的实验结果一致。此外，我们发现，包括与能量相关的O-2（+）-离子二次电子发射产额对放电特性有显著影响，包括鞘层宽度减小。

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