...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Plasma Sources Science & Technology >Curling probe measurement of a large-volume pulsed plasma with surface magnetic confinement
【24h】

Curling probe measurement of a large-volume pulsed plasma with surface magnetic confinement

机译：卷曲探头测量大容量脉冲等离子体，表面磁监禁

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A curling probe (CP) based on microwave resonance is applied to the measurement of electron density in a pulsed DC glow discharge under surface magnetic confinement (SMC) provided by a number of permanent magnets on a chamber wall. Owing to the SMC effects, a 1 m scale large-volume plasma is generated by a relatively low voltage (similar to 1 kV) at low pressure (similar to 1 Pa) in various gases (Ar, CH4, and C2H2). Temporal variation of the electron density is measured for pulse frequency f = 0.5-25 kHz for various discharge-on times (TON) with a high resolution time (similar to 0.2 mu s), using the on-point mode. In general, the electron density starts to increase at time t = 0 after turn-on of the discharge voltage, reaches peak density at t = TON, and then decreases after turn-off. The peak electron density is observed to increase with the pulse frequency f for constant TON owing to the residual plasma. This dependence is successfully formulated using a semi-empirical model. The spatio-temporal evolution of the cathode sheath in the pulsed discharge is revealed by a 1 m long movable CP. The measured thickness of the high-voltage cathode fall in a steady state coincides with the value of the so-called Child-Langmuir sheath.
机译：采用基于微波谐振的卷曲探针（CP）测量了脉冲直流辉光放电中的电子密度，该放电由室壁上的多个永磁体提供。由于SMC效应，在各种气体（Ar、CH4和C2H2）中，在低压（类似于1Pa）下通过相对较低的电压（类似于1kV）产生1m规模的大体积等离子体。在脉冲频率f=0.5-25 kHz的情况下，使用on点模式，测量了具有高分辨率时间（类似于0.2μs）的各种放电开启时间（吨）下电子密度的时间变化。一般来说，电子密度在放电电压开启后的t=0时开始增加，在t=t时达到峰值密度，然后在关闭后降低。由于残余等离子体的存在，在恒定的顿数下，峰值电子密度随脉冲频率f的增加而增加。利用半经验模型成功地描述了这种依赖关系。脉冲放电中阴极鞘层的时空演化由一个1m长的可移动CP揭示。在稳态下测量的高压阴极厚度与所谓的Child Langmuir鞘层的值一致。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号