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首页> 外文期刊>Plasma Sources Science & Technology >Characterization of magnetically confined low-pressure plasmas produced by an electromagnetic field in argon-acetylene mixtures
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Characterization of magnetically confined low-pressure plasmas produced by an electromagnetic field in argon-acetylene mixtures

机译：氩气混合物中电磁场产生的磁局限狭窄的低压等离子体的表征

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摘要

Dust particles formation was investigated in magnetically confined low-pressure plasma produced in argon-acetylene mixtures. The plasma characteristics were measured in order to identify the species involved in the dust particles formation. Their dependence on the operating conditions including magnetic field intensity, acetylene fraction in the gas mixture and operating pressure was examined. In contrast with noble gases, in the presence of acetylene, the electron temperature increases with the magnetic field intensity, indicating additional charged particles losses in the plasma. Indeed, in these conditions, larger hydrocarbon ions are produced leading to the formation of dust particles in the plasma volume. The observed dependence of positive ion mass distribution and density and relative negative ion density on the operating parameters suggests that the dust particles are formed through different pathways, where negative and positive ions are both involved in the nucleation.
机译：研究了在氩-乙炔混合物中产生的磁约束低压等离子体中尘埃颗粒的形成。测量等离子体特征，以确定与尘埃颗粒形成有关的物种。研究了它们对操作条件的依赖性，包括磁场强度、混合气体中的乙炔分数和操作压力。与惰性气体相比，在乙炔存在的情况下，电子温度随着磁场强度的增加而增加，表明等离子体中额外的带电粒子损失。事实上，在这些条件下，会产生更大的碳氢化合物离子，从而在等离子体体积中形成灰尘颗粒。观察到的正离子质量分布和密度以及相对负离子密度对操作参数的依赖性表明，灰尘颗粒通过不同的路径形成，其中负离子和正离子都参与成核。

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