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Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms

机译：低压电容式射频放电的表面处理由定制电压波形驱动

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Particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations are performed to investigate the sputtering and the secondary electron emission (SEE) in geometrically symmetric capacitively coupled Ar discharges with Cu electrodes driven by tailored voltage waveforms (TVWs). The driving voltage waveform is composed of multiple consecutive harmonics (1≤N≤4) of the fundamental frequency (13.56 MHz) and is tailored by adjusting the identical phases (θ) of the even harmonics. The simulations are based on a discharge model in which realistic approaches are implemented for the description of the SEE induced by electrons and heavy-particles at the electrodes, as well as for the sputtering of the electrodes by heavy-particles. In case of applying a single frequency, the voltage amplitude is varied (250 V≤ Φ_1 ≤2500 V), while in case of applying multi-frequency TVWs, N and θ are varied at a fixed total voltage amplitude (Φ_(tot) = 1000 V) at a low pressure of 0.5 Pa. By applying more than one harmonic to drive the discharge, the mean energy of Ar~+ ions and fast Ar atoms at the electrodes can be controlled by changing the phase angles. Due to the dependence of the sputtering yield on the heavy-particle energies, the flux of sputtered atoms can as well be controlled by the phase angles at both electrodes. The domain over which the sputtered atom flux can be varied is enlarged by adding more harmonics to the driving voltage waveform. For all conditions investigated, electron induced SEs (δ-electrons) induce strong ionization in the α-mode and dominate the ionization dynamics at high voltage amplitudes.
机译：采用粒子胞内/蒙特卡罗碰撞（PIC/MCC）模拟研究了在定制电压波形（TVW）驱动的铜电极几何对称电容耦合氩放电中的溅射和二次电子发射（SEE）。驱动电压波形由多个连续谐波组成（1≤N≤4） 基频（13.56 MHz）的频率，并通过调整偶数谐波的相同相位（θ）进行调整。模拟基于放电模型，在该模型中，对电子和重粒子在电极上引起的SEE以及重粒子对电极的溅射进行了实际的描述。如果使用单一频率，电压振幅会发生变化（250 V≤ Φ_1 ≤2500V），而在施加多频TVW的情况下，N和θ在0.5Pa的低压下以固定的总电压振幅（Φ（tot）=1000V）变化。通过施加多个谐波来驱动放电，可以通过改变相角来控制电极上Ar~+离子和快Ar原子的平均能量。由于溅射产额与重粒子能量有关，溅射原子的通量也可以由两个电极的相角控制。通过向驱动电压波形中添加更多谐波，可以扩大溅射原子通量变化的区域。在所研究的所有条件下，电子诱导的SEs（δ电子）在α模式下诱导强电离，并在高电压振幅下主导电离动力学。

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