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首页> 外文期刊>Journal of Materials Engineering and Performance >Investigation of the Effect of Residual Stress Gradient on the Wear Behavior of PVD Thin Films
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Investigation of the Effect of Residual Stress Gradient on the Wear Behavior of PVD Thin Films

机译：残余应力梯度对PVD薄膜磨损行为的影响研究

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The control of residual stresses has been seldom investigated in multilayer coatings dedicated to improvement of wear behavior. Here, we report the preparation and characterization of superposed structures composed of Cr, CrN and CrAlN layers. Nano-multilayers CrN/CrAlN and Cr/CrN/CrAlN were deposited by Physical Vapor Deposition (PVD) onto Si (100) and AISI4140 steel substrates. The Cr, CrN and CrAlN monolayers were developed with an innovative approach in PVD coatings technologies corresponding to deposition with different residual stresses levels. Composition and wear tracks morphologies of the coatings were characterized by scanning electron microscopy, high-resolution transmission electron microscopy, atomic force microscopy, x-ray photoelectron spectroscopy, energy-dispersive x-ray spectroscopy, x-ray diffraction and 3D-surface analyzer. The mechanical properties (hardness, residual stresses and wear) were investigated by nanoindentation, interferometry and micro-tribometry (fretting-wear tests). Observations suggest that multilayer coatings are composed mostly of nanocrystalline. The residual stresses level in the films has practically affected all the physicochemical and mechanical properties as well as the wear behavior. Consequently, it is demonstrated that the coating containing moderate stresses has a better wear behavior compared to the coating developed with higher residual stresses. The friction contact between coated samples and alumina balls shows also a large variety of wear mechanisms. In particular, the abrasive wear of the coatings was a combination of plastic deformation, fine microcracking and microspallation. The application of these multilayers will be wood machining of green wood.
机译：在致力于改善磨损性能的多层涂层中，残余应力的控制很少被研究。在这里，我们报告了由Cr、CrN和CrAlN层组成的叠加结构的制备和表征。采用物理气相沉积法（PVD）在Si（100）和AISI4140钢衬底上沉积了纳米多层CrN/CrAlN和Cr/CrN/CrAlN。Cr、CrN和CrAlN单分子膜是在PVD涂层技术中采用创新方法开发的，对应于具有不同残余应力水平的沉积。采用扫描电子显微镜、高分辨率透射电子显微镜、原子力显微镜、x射线光电子能谱、能量色散x射线能谱、x射线衍射和三维表面分析仪对涂层的成分和磨损痕迹形貌进行了表征。通过纳米压痕法、干涉法和微摩擦学（微动磨损试验）研究了材料的机械性能（硬度、残余应力和磨损）。观察表明，多层涂层主要由纳米晶体组成。薄膜中的残余应力水平实际上影响了所有的物理化学和机械性能以及磨损行为。结果表明，与残余应力较高的涂层相比，含中等应力的涂层具有更好的磨损性能。涂层样品和氧化铝球之间的摩擦接触也显示出多种磨损机制。特别是，涂层的磨粒磨损是塑性变形、微细裂纹和微剥落的组合。这些多层膜的应用将是绿色木材的木材加工。

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