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首页> 外文期刊>Journal of Materials Engineering and Performance >Influence of Mo Doping on the Microstructure, Friction, and Wear Properties of CrAlN Films
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Influence of Mo Doping on the Microstructure, Friction, and Wear Properties of CrAlN Films

机译：Mo掺杂对Craln薄膜微观结构，摩擦和磨损性能的影响

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摘要

In this study, closed-field unbalanced magnetron sputtering ion-plating technology is used to deposit CrAlMoN and CrAlN nanomultilayer films on the surfaces of M2 tool steel and single-crystal Si. Energy-dispersive spectroscopy, scanning electron microscopy, x-ray photoelectron spectroscopy, transmission electron microscopy, x-ray diffraction, scratch tester, nanoindenter, and pin-on-disk wear tester are used to study the influence of Mo doping on the composition, microstructure, mechanical properties, and friction properties of CrAlN films. Results show that CrAlMoN films have a nanomultilayer structure, CrN/Mo2N/CrN/AlN, with a modulation period of 10.5 nm. After Mo doping, the face-centered cubic structure of CrAlMoN films remains the same as that of CrAlN films. The chemical valence of each element in CrAlN films does not change with Mo doping. At room temperature, the wear resistance of CrAlMoN films is significantly improved compared with that of CrAlN films. This is attributed to the significant antifriction effect of MoO3 that forms on CrAlMoN films doped with Mo during the friction process.
机译：本研究采用闭合场非平衡磁控溅射离子镀技术在M2工具钢和单晶硅表面制备了CrAlMoN和CrAlN纳米多层膜。利用能谱仪、扫描电子显微镜、x射线光电子能谱仪、透射电子显微镜、x射线衍射仪、划痕仪、纳米压头和销盘磨损仪研究了Mo掺杂对CrAlN薄膜成分、微观结构、力学性能和摩擦性能的影响。结果表明，CrAlMoN薄膜具有CrN/Mo2N/CrN/AlN纳米多层结构，调制周期为10.5nm。Mo掺杂后，CrAlMoN薄膜的面心立方结构与CrAlN薄膜相同。CrAlN薄膜中各元素的化学价态不随Mo掺杂而改变。在室温下，与CrAlN薄膜相比，CrAlMoN薄膜的耐磨性显著提高。这归因于MoO3在摩擦过程中在掺杂Mo的CrAlMoN薄膜上形成的显著减摩效应。

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