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首页> 外文期刊>Journal of Materials Engineering and Performance >High-Temperature Oxidation Resistance of CrMoN Films
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High-Temperature Oxidation Resistance of CrMoN Films

机译：高温抗氧化抗性致力

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摘要

The CrMoN film is deposited on the surface of M2 tool steel using the closed-field unbalanced magnetron sputtering technology. We measured the surface morphology, composition, phase structure, hardness and film/base bonding strength of CrMoN film using a scanning electron microscope, x-ray diffractometer, nano-indenter and scratch tester after oxidation at room temperature, 500, 600, and 700 degrees C for 1 h. The results of this study demonstrated that the crystal structure and mechanical property of CrMoN film at room temperature are maintained after oxidation at 500 degrees C for 1 h. In addition, with the increase in oxidation temperature, there is an increase in the evaporation of MoO(3)on the film surface and the oxidation degree of the film along with the appearance of fine pores. Moreover, the mechanical property and film/base bonding strength of CrMoN film significantly decrease after oxidization at 700 degrees C for 1 h.
机译：采用闭合场非平衡磁控溅射技术在M2工具钢表面沉积CrMoN薄膜。用扫描电子显微镜、x射线衍射仪、纳米压头和划痕仪测量了CrMoN薄膜在室温氧化后的表面形貌、成分、相结构、硬度和膜基结合强度，本研究结果表明，在500℃氧化1h后，CrMoN薄膜在室温下的晶体结构和机械性能保持不变。此外，随着氧化温度的升高，随着微孔的出现，MoO（3）在膜表面的蒸发和膜的氧化程度增加。此外，在700℃氧化1h后，CrMoN薄膜的机械性能和膜基结合强度显著降低。

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