...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Micromechanics and Microengineering >High-accuracy differential resonant pressure sensor with linear fitting method
【24h】

High-accuracy differential resonant pressure sensor with linear fitting method

机译：具有线性配件方法的高精度差分谐振压力传感器

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A high-accuracy differential resonant pressure sensor with two similar resonators is proposed using the linear fitting method to guarantee its output linearity without polynomial compensation. Results reveal that the nonlinearity of the differential resonant pressure sensor is largely dependent on the tensile/compressive sensor pressure-stress ratio c when two similar resonators are used separately as compressive and tensile elements. Nonlinearity decreases sharply with an appropriate ratio c. A theoretical model is proposed to obtain minimal nonlinearity and shows satisfactory agreement with the simulation results. The impact factors of ratio c are analyzed to facilitate adjustments with the designed value. Moreover, micromachining methods are used to fabricate sensing chips. Experiment results show that the nonlinearity and measurement sensitivity of the proposed differential resonant pressure sensor are +/- 0.02% FS and 35.5 Hz kPa(-1) with the linear fitting method in a pressure range of 0-200 kPaA and temperature range of -40 degrees C to +40 degrees C. The differential linear fitting method largely decreases compensation complexity without polynomial fitting for high-precision pressure measurement.
机译：提出了一种具有两个相似谐振腔的高精度差动谐振式压力传感器，该传感器采用线性拟合方法来保证其输出线性度，无需多项式补偿。结果表明，当两个相似的谐振器分别用作压缩和拉伸元件时，差动谐振压力传感器的非线性在很大程度上取决于拉伸/压缩传感器的压力-应力比c。在适当的比例c下，非线性急剧下降。提出了一个理论模型，以获得最小的非线性，并与仿真结果显示了令人满意的一致性。分析比率c的影响因素，以便于按照设计值进行调整。此外，微机械方法被用于制造传感芯片。实验结果表明，在0-200kPaa的压力范围和-40℃～+40℃的温度范围内，采用线性拟合方法，所提出的差动谐振压力传感器的非线性和测量灵敏度分别为+/-0.02%FS和35.5Hz kPa（-1）。差动线性拟合方法大大降低了补偿复杂度，而无需对传感器进行多项式拟合高精度压力测量。

著录项

  • 来源
  • 作者

    Han Xiangguang; Zhao Libo; Wang Jiuhong; Wang Li; Huang Mimi; Chen Cuilan; Yang Ping; Li Zhikang; Zhu Nan; Wang Songli; Yan Xin; Wang Yonglu; Wang Hongyan; Wu Yongshun; Chen Yao; Jiang Zhuangde;

  • 作者单位

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xian Flight Automat &

    Control Inst Xian 710049 Peoples R China;

    Xian Flight Automat &

    Control Inst Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Shaanxi Inst Metrol Sci Xian 710065 Peoples R China;

    Shaanxi Inst Metrol Sci Xian 710065 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ Int Joint Lab Micro Nano Mfg &

    Measurement Techno State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路（IC）;
  • 关键词

    resonant pressure sensor; differential output; linear fitting; high accuracy;

    机译：谐振式压力传感器;差分输出;线性拟合;高精度;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号