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首页> 外文期刊>Journal of Micromechanics and Microengineering >A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects
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A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects

机译：具有低元素间耦合效应的双频压电微机械超声换能器阵列

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摘要

This paper presents a dual-frequency piezoelectric micromachined ultrasonic transducer (PMUT) line array with low crosstalk level, which was fabricated on silicon-on-insulator (SOI) wafers with sputtered piezoelectric thin film (PZT) and Si diaphragm structure. The obtained array consists of 120 of 0.77 MHz and 192 of 2.30 MHz PMUT units in total with minimum interspace of 50 mu m. Due to the high piezoelectric coefficient of PZT, the PMUT shows high transmitting sensitivity in air and good effective electromechanical coupling factor. The displacement sensitivities are assessed to be 595 nm V-1 and 112 nm V-1 at the resonant frequencies of 0.77 MHz and 2.30 MHz respectively in air. To reduce the vibration coupling, rectangular grooves in the bottom silicon are designed between the adjacent line elements, and the PMUT units in the array are arranged in a mis-aligned style. Modal analysis for the 0.77 MHz units indicates neighbouring coupling-vibration decreases greatly from 44.5% to 14.8% of the excited vibration when the excited line is driven at 4Vpp, which proves both the grooves and the mis-aligned ranking are effective for coupling effect reduction. Moreover, results indicate the coupling effect between different frequencies can be ignored due to their inherent resonance characteristics. The sound pressures for a single 0.77 MHz line element and 2.30 MHz line element are evaluated to be 53 kPa and 73 kPa at a distance of 1 cm in water. This high performance dual-frequency PMUT line array makes some high resolution imaging methods possible based on PMUT technology, such as those of dual-frequency, total focus.
机译：本文提出了一种低串扰的双频压电微机械超声换能器（PMUT）线阵，该线阵由溅射压电薄膜（PZT）和硅膜片结构的绝缘体上硅（SOI）晶片制成。该阵列由120个0.77 MHz和192个2.30 MHz PMUT单元组成，最小间距为50μm。由于PZT的高压电系数，PMUT在空气中具有较高的传输灵敏度和良好的有效机电耦合系数。在空气中，共振频率为0.77MHz和2.30MHz时，位移灵敏度分别为595nm V-1和112nm V-1。为了减少振动耦合，在相邻线元件之间的底部硅中设计了矩形槽，阵列中的PMUT单元以错误对齐的方式排列。对0.77MHz机组的模态分析表明，当激励线以4Vpp驱动时，相邻耦合振动从激励振动的44.5%大幅降低到14.8%，这证明了槽和错排排列对降低耦合效应是有效的。此外，结果表明，由于固有的共振特性，不同频率之间的耦合效应可以忽略。单个0.77 MHz线状元件和2.30 MHz线状元件在水中距离为1 cm时的声压评估为53 kPa和73 kPa。这种高性能的双频PMUT线阵列使得基于PMUT技术的一些高分辨率成像方法成为可能，例如双频、全聚焦成像方法。

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