• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied optics >Robust incident angle calibration of angle-resolved ellipsometry for thin film measurement
【24h】

Robust incident angle calibration of angle-resolved ellipsometry for thin film measurement

机译：薄膜测量的角度分辨椭圆形测量的强大入射角校准

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Angle-resolved ellipsometry with back focal plane imaging has been found to be of increasing importance in recent industrial sensing by virtue of its rich information provided at various incident and azimuthal angles. To achieve high sensing accuracy, the incident angles of a back focal plane must be accurately calibrated. For this purpose, a simple and robust incident angle calibration method based on full-field Brewster angle fitting is proposed, without expensive tools or complex operations. With this method, a back focal plane image is first captured from boundary reflectance through a high-numerical-aperture objective. By extracting annular data from the image, radius-dependent ellipsometric parameters (psi,Delta) are calculated. At the end, the radii of the back focal plane are mapped to the angle of incidence by using a fitted Brewster angle as the reference. The method is validated by simulation and experiments using a homemade angle-resolved ellipsometer and a commercial spectroscopic ellipsometer. The results show that the proposed method provides a 75% error reduction approximately from generally used methods. (C) 2021 Optical Society of America
机译：后焦平面成像的角分辨椭偏仪由于在各种入射角和方位角下提供了丰富的信息，在最近的工业传感中越来越重要。为了获得高的传感精度，必须精确校准后焦平面的入射角。为此，提出了一种基于全场布儒斯特角拟合的简单而稳健的入射角校准方法，无需昂贵的工具或复杂的操作。采用这种方法，首先通过高数值孔径物镜从边界反射率中获取后焦平面图像。通过从图像中提取环形数据，计算与半径相关的椭偏参数（psi，Delta）。最后，使用拟合的布鲁斯特角作为参考，将后焦平面的半径映射到入射角。利用自制的角分辨椭偏仪和商用光谱椭偏仪对该方法进行了仿真和实验验证。结果表明，该方法与常用方法相比，误差降低了约75%。（2021）美国光学学会

著录项

  • 来源
    《Applied optics》 |2021年第13期|共6页
  • 作者

    Peng Lihua; Tang Dawei; Wang Jian; Chen Rong; Gao Feng; Zhou Liping;

  • 作者单位

    Huazhong Univ Sci &

    Technol State Key Lab Digital Mfg Equipment &

    Technol Wuhan 430074 Peoples R China;

    Univ Huddersfield Ctr Precis Technol Huddersfield HD1 3DH W Yorkshire England;

    Huazhong Univ Sci &

    Technol State Key Lab Digital Mfg Equipment &

    Technol Wuhan 430074 Peoples R China;

    Huazhong Univ Sci &

    Technol State Key Lab Digital Mfg Equipment &

    Technol Wuhan 430074 Peoples R China;

    Univ Huddersfield Ctr Precis Technol Huddersfield HD1 3DH W Yorkshire England;

    Huazhong Univ Sci &

    Technol State Key Lab Digital Mfg Equipment &

    Technol Wuhan 430074 Peoples R China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 应用;
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号