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Method for measuring the relative phases among the three beams in the case of homodyne three-beam interference

机译：在杂差三梁干扰的情况下，在杂交三梁干扰的情况下测量三个光束中相对阶段的方法

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摘要

A method for measuring the relative phases (RPs) among the three beams in the case of homodyne three-beam interference (TBI) is proposed and verified by the ZEMAX simulation in this paper. The method requires that the interference beams are not on the same plane, that is, any two of the three beams interfere at an angle in different planes. Based on the phase delay of the beam in space, the inclined beams have different phases at different positions within the beams' range. By arranging the photodetector array within the interference area, the RPs can be calculated using the intensity of the interference light received by specific photodetector units. The application of the algorithm for the displacement measurement of the homodyne three-beam interferometer (TBIR) has been verified by simulation. The beam number of three-beam interference is one less than that of two two-beam interference when measuring two relative phases. Compared with the two-beam interferometer, the TBIR applied to two-degree-of-freedom displacement measurement is more compact in structure due to the more compact phase measurement components. (C) 2021 Optical Society of America
机译：本文提出了一种在零差三光束干涉（TBI）情况下测量三光束间相对相位（RPs）的方法，并通过ZEMAX仿真进行了验证。该方法要求干涉光束不在同一平面上，即三个光束中的任意两个在不同平面上以一定角度干涉。根据光束在空间中的相位延迟，倾斜光束在光束范围内的不同位置具有不同的相位。通过将光电探测器阵列布置在干扰区域内，可以使用特定光电探测器单元接收的干扰光的强度来计算RPs。通过仿真验证了该算法在零差三光束干涉仪（TBIR）位移测量中的应用。在测量两个相对相位时，三光束干涉的光束数比两光束干涉的光束数少一个。与双光束干涉仪相比，用于二自由度位移测量的TBIR由于相位测量元件更紧凑，结构更紧凑。（2021）美国光学学会

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  • 来源
    《Applied optics》 |2021年第11期|共13页
  • 作者

    Xia Yizhou; Zhang Ming; Zhu Yu; Wang Leijie; Ye Weinan;

  • 作者单位

    Tsinghua Univ Dept Mech Engn State Key Lab Tribol Beijing 100084 Peoples R China;

    Tsinghua Univ Dept Mech Engn State Key Lab Tribol Beijing 100084 Peoples R China;

    Tsinghua Univ Dept Mech Engn State Key Lab Tribol Beijing 100084 Peoples R China;

    Tsinghua Univ Dept Mech Engn State Key Lab Tribol Beijing 100084 Peoples R China;

    Tsinghua Univ Dept Mech Engn State Key Lab Tribol Beijing 100084 Peoples R China;

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