Extensive-dynamic-range and high-resolution surface profiling with phase-sensitive spectral-domain white-light interferometry

Jiao Zhicheng; Jiang Yunfei; Zhao Yuqian; Liu Jian; Yu Yao; Ma Zhenhe; Wang Yi

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Extensive-dynamic-range and high-resolution surface profiling with phase-sensitive spectral-domain white-light interferometry

机译：具有相敏谱域白光干涉法的广泛动态范围和高分辨率表面分析

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We demonstrate a Fourier-transform-based method for extensive-dynamic-range and high-resolution surface profiling using phase-sensitive spectral-domain white-light interferometry. By combining the frequency and phase of interference fringes, this method is capable of displacement measurement with nanometer-scale resolution and a dynamic range up to several millimeters. The performance of the method is demonstrated by surface profiling of a coin, gauge blocks, and a cell-phone circuit board. (C) 2021 Optical Society of America.

机译：我们展示了一种基于傅里叶变换的方法，用于使用相位敏感光谱域白光干涉术进行大动态范围和高分辨率表面轮廓测量。通过结合干涉条纹的频率和相位，该方法能够以纳米级分辨率进行位移测量，动态范围可达几毫米。该方法的性能通过硬币、量块和手机电路板的表面轮廓来证明。（2021）美国光学学会。

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《Applied optics》 |2021年第13期|共5页
作者
Jiao Zhicheng; Jiang Yunfei; Zhao Yuqian; Liu Jian; Yu Yao; Ma Zhenhe; Wang Yi;
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Northeastern Univ Qinhuangdao Sch Control Engn Qinhuangdao 066004 Hebei Peoples R China;

Northeastern Univ Qinhuangdao Sch Control Engn Qinhuangdao 066004 Hebei Peoples R China;

Northeastern Univ Qinhuangdao Sch Control Engn Qinhuangdao 066004 Hebei Peoples R China;

Northeastern Univ Qinhuangdao Sch Control Engn Qinhuangdao 066004 Hebei Peoples R China;

Northeastern Univ Qinhuangdao Sch Control Engn Qinhuangdao 066004 Hebei Peoples R China;

Northeastern Univ Qinhuangdao Sch Control Engn Qinhuangdao 066004 Hebei Peoples R China;

Northeastern Univ Qinhuangdao Sch Control Engn Qinhuangdao 066004 Hebei Peoples R China;

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1. Surface-Related Multiple Elimination on High-Resolution Geopulse Profile [J] . 中国海洋工程（英文版） . 2008,第002期
2. Recent Developments in Fiber Optic Spectral White-Light Interferometry [J] . Yi JIANG, Wenhui DING 光子传感器：英文版 . 2011,第001期
3. Monitoring subsidence rates along road network by persistent scatterer SAR interferometry with high-resolution TerraSAR-X imagery [J] . Bing Yu, Guoxiang Liu, Rui Zhang, 现代交通学报（英文版） . 2013,第004期
4. Monitoring subsidence rates along scatterer SAR interferometry with imagery road network by persistent high-resolution TerraSAR-X [J] . Bing Yu, Guoxiang Liu, Rui Zhang, 现代交通学报：英文版 . 2013,第004期
5. Surface acoustic waves profiled by stroboscopic white-light interferometry [J] . Laser Focus World: The Magazine for the Photonics & Optoelectronics Industry . 2015,第5期

机译：频闪式白光干涉法分析的表面声波
6. Fast Surface Profiling by White-Light Interferometry Using Symmetric Spectral Optical Filter [J] . Akira HIRABAYASHI IEICE Transactions on fundamentals of electronics, communications & computer sciences . 2010,第2期

机译：使用对称光谱滤光片的白光干涉法进行快速表面分析
7. Multi-scale analysis of high precision surfaces by Stylus Profiler, Scanning White-Light Interferometry and Atomic Force Microscopy [J] . N. Jouini, A. Gautier, P. Revel, International Journal of Surface Science and Engineering . 2009,第4期

机译：测针轮廓仪，扫描白光干涉仪和原子力显微镜对高精度表面进行多尺度分析
8. Signal processing in white-light scanning interferometry by Fourier transform and its application to surface profile measurements [C] . Songjie Luo, Yongxin Liu, Osami Sasaki, Optical metrology and inspection for industrial applications IV . 2016

机译：傅里叶变换在白光扫描干涉仪中的信号处理及其在表面轮廓测量中的应用
9. Spectral-Domain Phase-Sensitive Interferometry for Real-Time Probing of Electrodeposition Processes [D] . Chiu, YuJen. 2018

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10. Spectral-domain low-coherence interferometry for phase-sensitive measurement of Faraday rotation at multiple depths [O] . Yi-Jou Yeh, Adam J. Black, Taner Akkin -1

机译：光谱域低相干干涉法用于法拉第旋转在多个深度的相敏测量
11. Simultaneous Measurement of Film Thickness and Surface Profile of Film-Covered Objects by Using White-Light Interferometry [O] . Hidemitsu OGAWA, Ken-ichi SHIMOYAMA, Masakazu FUKUNAGA, 2007

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12. Measuring the Dispersion in Laser Cavity Mirrors using White-Light Interferometry; Master's thesis [R] . Goodspeed, A. S. 2008

机译：使用白光干涉法测量激光腔镜中的色散;硕士论文

Extensive-dynamic-range and high-resolution surface profiling with phase-sensitive spectral-domain white-light interferometry

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