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Simultaneous measurement of the refractive index and the pressure by mode splitting in concentric triple microring resonators with a single opening

机译：单个开口同心三相微型谐振器中的折射率和压力的同时测量折射率和压力

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摘要

Concentric triple microring resonators with a single opening on the flexible SU-8 substrate are proposed and theoretically demonstrated for simultaneous detection of refractive index (RI) and pressure changes. Since an opening defect is introduced, the mode splitting occurs, which forms a symmetric and an asymmetric standing wave mode (SWM). The energy distribution of the two SWMs is quite different so that the sensitivities of the RI and pressure in the SWMs can be distinguished. The RI sensitivities of 186.37 nm/RIU and 107.69 nm/RIU and the pressure sensitivities of 1.42 pm/KPa and 1.07 pm/KPa are obtained corresponding to the symmetric and the asymmetric SWMs, respectively. By solving a second-order sensitivity inverse matrix, the change in RI and pressure can be measured simultaneously, thereby eliminating the influence of the strain-optical coupling effect in the field of biosensing application. The proposed structure has great potential in achieving simultaneous measurement of multiple parameters. (C) 2021 Optical Society of America
机译：提出了一种在柔性SU-8基片上具有单开口的同心三微环谐振器，并从理论上证明了该谐振器可同时检测折射率（RI）和压力变化。由于引入了开口缺陷，出现了模式分裂，形成了对称和非对称驻波模式（SWM）。两种雨水管理系统的能量分布非常不同，因此可以区分雨水管理系统中RI和压力的灵敏度。对称和非对称SWMs的RI灵敏度分别为186.37nm/RIU和107.69nm/RIU，压力灵敏度分别为1.42pm/KPa和1.07pm/KPa。通过求解二阶灵敏度逆矩阵，可以同时测量RI和压力的变化，从而消除生物传感应用领域中应变-光耦合效应的影响。该结构在实现多参数同时测量方面具有很大的潜力。（2021）美国光学学会

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  • 来源
    《Applied optics》 |2021年第11期|共9页
  • 作者

    Zhang Ping; Zhang Chen; Yan Zhiruo;

  • 作者单位

    Tianjin Univ Sch Elect &

    Informat Engn Tianjin 300072 Peoples R China;

    Tianjin Univ Sch Elect &

    Informat Engn Tianjin 300072 Peoples R China;

    Tianjin Univ Sch Elect &

    Informat Engn Tianjin 300072 Peoples R China;

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