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Vector scanning subtractive manufacturing technology for laser rapid fabrication

机译：矢量扫描激光快速制造的减法制造技术

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摘要

Herein, a vector scanning subtractive manufacturing technology is proposed to rapidly fabricate smooth microoptical components, which is based on the vector scanning method and wet etching. Compared with the raster scanning method, the vector scanning method increases processing efficiency by nearly two orders and mitigates a buildup of stress around the laser processed region, avoiding the generation of cracks. The Letter demonstrates the fabrication of three-dimensional (3D) micro-structures with various sizes and morphologies. For example, micro-concave lenses with diameters of 20 mu m to 140 mu m, heights of 10 mu m to 70 mu m, and surface roughness of 29 nm are flexibly fabricated on sapphire by vector scanning subtractive manufacturing technology. The results indicate that the technology has broad prospects in the field of monolithic integrated 3D all-solid-state micro-optics. (C) 2021 Optical Society of America
机译：本文提出了一种基于矢量扫描法和湿法刻蚀的快速制造光滑微光学元件的矢量扫描减法制造技术。与光栅扫描法相比，矢量扫描法将处理效率提高了近两个数量级，并减轻了激光处理区域周围的应力积聚，避免了裂纹的产生。这封信展示了各种尺寸和形态的三维（3D）微结构的制作。例如，通过矢量扫描减法制造技术，在蓝宝石上灵活地制造出直径为20μm至140μm、高度为10μm至70μm、表面粗糙度为29 nm的微凹透镜。结果表明，该技术在单片集成三维全固态微光学领域具有广阔的应用前景。（2021）美国光学学会

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  • 来源
    《Optics Letters》 |2021年第8期|共4页
  • 作者

    Lu Yi-Ming; Liu Xue-Qing; Zhu Lin; Chen Qi-Dai; Juodkazis Saulius; Sun Hong-Bo;

  • 作者单位

    Jilin Univ Coll Elect Sci &

    Engn State Key Lab Integrated Optoelect Changchun 130012 Peoples R China;

    Jilin Univ Coll Elect Sci &

    Engn State Key Lab Integrated Optoelect Changchun 130012 Peoples R China;

    Jilin Univ Coll Elect Sci &

    Engn State Key Lab Integrated Optoelect Changchun 130012 Peoples R China;

    Jilin Univ Coll Elect Sci &

    Engn State Key Lab Integrated Optoelect Changchun 130012 Peoples R China;

    Swinburne Univ Technol Fac Sci Engn &

    Technol John St Hawthorn Vic 3122 Australia;

    Jilin Univ Coll Elect Sci &

    Engn State Key Lab Integrated Optoelect Changchun 130012 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 计量学;光学;
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