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Correction of aberration-induced phase errors in phase measuring deflectometry

机译：阶段测量偏转测量中的像差诱导的相位误差的校正

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摘要

Phase measuring deflectometry is a powerful measuring method of complex optical surfaces that captures the reflected fringe images associated with a displaying screen and calculates the normal vectors of the surface under test (SUT) accordingly. The captured images are usually set conjugate to the SUT, which in turn makes the screen defocused. As a result, the blurring effect caused by the defocus and aberrations of the off-axis catadioptric imaging system can severely degrade the phases solved from the blurred images. In order to correct the phase errors, the space-variant point spread functions (PSFs) are modeled using a skew-normal function. The phase bias is estimated by forward convolution between the captured images and the PSF models. Demonstrated with a highly curved aspheric surface, the measurement accuracy can be improved by three times. (C) 2021 Optical Society of America
机译：相位测量偏折术是一种功能强大的复杂光学表面测量方法，它可以捕获与显示屏相关的反射条纹图像，并相应地计算被测表面（SUT）的法向量。捕获的图像通常与SUT共轭，从而使屏幕散焦。因此，离轴折反射成像系统的散焦和像差引起的模糊效应会严重降低模糊图像的相位。为了校正相位误差，使用斜正态函数对空间变量点扩展函数（PSF）进行建模。相位偏差通过捕获图像和PSF模型之间的前向卷积来估计。通过一个高度弯曲的非球面，测量精度可以提高三倍。（2021）美国光学学会

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  • 来源
    《Optics Letters》 |2021年第9期|共4页
  • 作者

    Zhang Xiangchao; Niu Zhenqi; Ye Junqiang; Xu Min;

  • 作者单位

    Fudan Univ Shanghai Engn Res Ctr Ultraprecis Opt Mfg Shanghai 200438 Peoples R China;

    Fudan Univ Shanghai Engn Res Ctr Ultraprecis Opt Mfg Shanghai 200438 Peoples R China;

    Fudan Univ Shanghai Engn Res Ctr Ultraprecis Opt Mfg Shanghai 200438 Peoples R China;

    Fudan Univ Shanghai Engn Res Ctr Ultraprecis Opt Mfg Shanghai 200438 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 计量学;光学;
  • 关键词

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