Visible and near-infrared microdisk resonators on a 4H-silicon-carbide-on-insulator platform

Wang Chengli; Shen Chen; Yi Ailun; Yang Shumin; Zhou Liping; Zhu Yifan; Huang Kai; Song Sannian; Zhou Min; Zhang Jiaxiang; Ou Xin

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Visible and near-infrared microdisk resonators on a 4H-silicon-carbide-on-insulator platform

机译：在4H-硅 - 碳化灯上平台上可见和近红外Microdisk谐振器

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Wavelength-sized microdisk resonators were fabricated on a single crystalline 4H-silicon-carbide-on-insulator (4H-SiCOI) platform. By carrying out micro-photoluminescence measurements at room temperature, we show that the microdisk resonators support whispering-gallery modes (WGMs) with quality factors up to 5.25 x 10(3) and mode volumes down to 2.61 x (lambda/n)(3) at the visible and near-infrared wavelengths. Moreover, the demonstrated wavelength-sized microdisk resonators exhibit WGMs whose resonant wavelengths are compatible with the zero-phonon lines of silicon related spin defects in 4H-SiCOI, making them a promising candidate for applications in cavity quantum electrodynamics and integrated quantum photonic circuits. (C) 2021 Optical Society of America

机译：在单晶4H碳化硅绝缘体（4H SiCOI）平台上制作了波长大小的微盘谐振器。通过在室温下进行微光致发光测量，我们发现，在可见光和近红外波长下，微盘谐振器支持质量因子高达5.25 x 10（3）且模式体积低至2.61 x（λ/n）（3）的回音廊模式（WGM）。此外，所展示的波长大小的微盘谐振器展示了WGM，其共振波长与4H-SiCOI中与硅相关的自旋缺陷的零声子线兼容，使其成为腔量子电动力学和集成量子光子电路中有前途的应用候选。（2021）美国光学学会

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来源
《Optics Letters》 |2021年第12期|共4页
作者
Wang Chengli; Shen Chen; Yi Ailun; Yang Shumin; Zhou Liping; Zhu Yifan; Huang Kai; Song Sannian; Zhou Min; Zhang Jiaxiang; Ou Xin;
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Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

Chinese Acad Sci Shanghai Adv Res Inst Shanghai Synchrotron Radiat Facil Shanghai 201204 Peoples R China;

Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

Chinese Acad Sci Shanghai Inst Microsyst &

Informat Technol State Key Lab Funct Mat Informat Shanghai 200050 Peoples R China;

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正文语种 eng
中图分类计量学;光学;
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1. Radiation-pressure-driven mechanical oscillations in silica microdisk resonators on chip [J] . WANG GuanZhong, ZHAO MingMing, MA JiYang, 中国科学:物理学力学天文学（英文版） . 2015,第005期
2. Microwave photonic filter with a continuously tunable central frequency using an SOI high-Q microdisk resonator [J] . Liu Li, Yang Ting, Dong Jian-Ji 中国物理：英文版 . 2014,第009期
3. Investigation of mode radiation loss for microdisk resonators with pedestals by FDTD technique [J] . Yuede Yang, Shijiang Wang, Yongzhen Huang 中国光学快报：英文版 . 2010,第005期
4. Notched-elliptical polymer microdisk resonator for unidirectional emission at visible and near-infrared wavelengths [J] . Ma Xiaoming, Fan Shuzhen, Wei Heming, Annales de l'I.H.P . 2020,第5期

机译：不可见和近红外波长下的非自向发射的缺口 - 椭圆聚合物微仪谐振器
5. High-quality integrated microdisk resonators in the visible-to-near-infrared wavelength range on a 3C-silicon carbide-on-insulator platform [J] . Optics Letters . 2020,第1期

机译：高质量集成微仪谐振器在3C - 碳化碳化碳化灯平台上的可见到近红外波长范围内
6. Refractometric sensing of Li salt with visible-light Si_3N_4 microdisk resonators [J] . C. Doolin, P. Doolin, B. C. Lewis, Applied Physics Letters . 2015,第8期

机译：用可见光Si_3N_4微型磁盘谐振器对锂盐进行折光检测
7. Visible photoluminescence in cubic (3C) silicon carbide coupled to high quality microdisk resonators [C] . Radulaski Marina, Babinec Thomas M., Muller Kai, Conference on Lasers and Electro-Optics . 2015

机译：立方（3C）碳化硅中的可见光致发光与高质量微盘谐振器耦合
8. Analytical modeling of a novel microdisk resonator for liquid-phase sensing: an all-shear interaction device (ASID). [D] . Sotoudegan, Mohamad Sadegh. 2016

机译：用于液相传感的新型微盘谐振器的分析模型：全剪切相互作用装置（ASID）。
9. High-Q microresonators on 4H-silicon-carbide-on-insulator platform for nonlinear photonics [O] . Chengli Wang, Zhiwei Fang, Ailun Yi, 2021

机译：高Q微谐振器在4H-碳化硬质合金 - 绝缘体平台上的非线性光子
10. Hybrid silicon nitride and colloidal nanocrystal waveguides and microdisks: a highly versatile test bed for visible to near-infrared active integrated photonics [O] . De Geyter Bram, Komorowska Katarzyna, Hens Zeger, 2011

机译：混合氮化硅和胶体纳米晶体波导和微型圆盘：用于可见光到近红外有源集成光子学的高度通用的测试床
11. Visible and Near-Infrared Channel Calibration of the GOES-6 VISSR (Visible Infrared Spin-Scan Radiometer) Using High-Altitude Aircraft Measurements [R] . Smith, G. R., Levin, R. H., Koyanagi, R. S., 1989

机译：使用高空飞机测量的GOEs-6 VIssR（可见红外自旋扫描辐射计）的可见光和近红外通道校准

Visible and near-infrared microdisk resonators on a 4H-silicon-carbide-on-insulator platform

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