Electro-optically tunable microring laser monolithically integrated on lithium niobate on insulator

Yin DiFeng; Zhou Yuan; Liu Zhaoxiang; Wang Zhe; Zhang Haisu; Fang Zhiwei; Chu Wei; Wu Rongbo; Zhang Jianhao; Chen Wei; Wang Min; Cheng Ya

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Electro-optically tunable microring laser monolithically integrated on lithium niobate on insulator

机译：电光可调谐微管激光器在绝缘体上的锂铌酸锂上整体整合

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We demonstrate monolithic integration of an electrooptically (EO) tunable microring laser on lithium niobate on insulator (LNOI) platform. The device is fabricated by photolithography assisted chemo-mechanical etching, and the pump laser is evanescently coupled into the erbium (Er3+)-doped lithium niobate (LN) microring laser using an undoped LN waveguide mounted above the microring. The quality factor of the LN microring resonator is measured as high as 1.54 x 10(5) at the wavelength of 1542 nm. Lasing action can be observed at a pump power threshold below 3.5 mW using a 980 nm continuous-wave pump laser. Finally, tuning of the laser wavelength is achieved by varying the electric voltage on the microelectrodes fabricated in the vicinity of a microring waveguide, showing an EO coefficient of 0.33 pm/V. (C) 2021 Optical Society of America

机译：我们演示了在绝缘体上的铌酸锂（LNOI）平台上集成电光可调谐微环激光器。该器件采用光刻辅助化学机械刻蚀技术制作，利用安装在微环上方的非掺杂铌酸锂（LN）波导，将泵浦激光器与掺铒铌酸锂（Er3+）微环激光器进行倏逝耦合。在1542nm波长下，LN微环谐振器的品质因数高达1.54x10（5）。使用980 nm连续波泵浦激光器，在低于3.5 mW的泵浦功率阈值下可以观察到激光作用。最后，通过改变在微环波导附近制作的微电极上的电压来实现激光波长的调谐，显示出EO系数为0.33 pm／V（C）2021美国光学学会。

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来源
《Optics Letters》 |2021年第9期|共4页
作者
Yin DiFeng; Zhou Yuan; Liu Zhaoxiang; Wang Zhe; Zhang Haisu; Fang Zhiwei; Chu Wei; Wu Rongbo; Zhang Jianhao; Chen Wei; Wang Min; Cheng Ya;
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Chinese Acad Sci Shanghai Inst Opt &

Fine Mech SIOM State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech SIOM State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

East China Normal Univ Sch Phys &

Elect Sci XXL Extreme Optoelectromech Lab Shanghai 200241 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech SIOM State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

East China Normal Univ Sch Phys &

Elect Sci XXL Extreme Optoelectromech Lab Shanghai 200241 Peoples R China;

East China Normal Univ Sch Phys &

Elect Sci XXL Extreme Optoelectromech Lab Shanghai 200241 Peoples R China;

East China Normal Univ Sch Phys &

Elect Sci XXL Extreme Optoelectromech Lab Shanghai 200241 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech SIOM State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech SIOM State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

East China Normal Univ Sch Phys &

Elect Sci XXL Extreme Optoelectromech Lab Shanghai 200241 Peoples R China;

East China Normal Univ Sch Phys &

Elect Sci XXL Extreme Optoelectromech Lab Shanghai 200241 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech SIOM State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

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中图分类计量学;光学;
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1. Electro-Optically Switchable Optical True Delay Lines of Meter-Scale Lengths Fabricated on Lithium Niobate on Insulator Using Photolithography Assisted Chemo-Mechanical Etching [J] . Jun-xia Zhou, Jian-hao Zhang, Rong-bo Wu, 中国物理快报：英文版 . 2020,第008期
2. Three-wavelength generation from cascaded wavelength conversion in monolithic periodically poled lithium niobate [J] . Xiao Kun, Zhang Jing, Chen Bao-Qin, 中国物理：英文版 . 2015,第001期
3. Modeling and analysis of silicon-on-insulator elliptical microring resonators for future high-density integrated photonic circuits [J] . Xiong Kang, Xiao Xi, Hu Ying-Tao, 中国物理：英文版 . 2012,第007期
4. Modeling and analysis of silicon-on-insulator elliptical microring resonators for future high-density integrated photonic circuits [J] . 熊康, 肖希, 胡应涛, 中国物理：英文版 . 2012,第007期
5. Electro-optically tunable microring resonators in lithium niobate [J] . Guarino A, Poberaj G, Rezzonico D, Nature photonics . 2007,第7期

机译：铌酸锂中的电光可调谐微环谐振器
6. Electro-optically tunable microring resonators on lithium niobate [J] . Tzyy-Jiann Wang, Chia-Hong Chu, Che-Yung Lin Optics Letters . 2007,第19期

机译：铌酸锂上的电光可调谐微环谐振器
7. Tunable large free spectral range microring resonators in lithium niobate on insulator [J] . Inna Krasnokutska, Jean-Luc J. Tambasco, Alberto Peruzzo Scientific reports. . 2019,第1期

机译：绝缘子锂铌酸盐中的可调谐大型自由谱系磁体谐振器
8. Electro-optically tunable waveguide Bragg gratings in Lithium Niobate integrated by femtosecond laser pulses [C] . W. Horn, S. Kroesen, C. Denz European Optical Society annual meeting . 2012

机译：飞秒激光脉冲集成铌酸锂中的电光可调波导布拉格光栅
9. Design, Fabrication, and Characterization of Monolithically Integrated Acoustic and Photonic Devices on Lithium Niobate Over Insulator (LNOI) Platform [D] . Mahmoud, Mohamed. 2018

机译：绝缘子上方铌酸锂（LNOI）平台上单片集成声光子器件的设计，制造和表征
10. Tunable large free spectral range microring resonators in lithium niobate on insulator [O] . Inna Krasnokutska, Jean-Luc J. Tambasco, Alberto Peruzzo -1

机译：绝缘子上铌酸锂中的可调大自由光谱范围微环谐振器
11. Electro-optically tunable microring resonators in lithium niobate [O] . Guarino, Andrea, Poberaj, Gorazd, Rezzonico, Daniele, 2007

机译：铌酸锂中的电光可调谐微环谐振器
12. Tunable Light Scattering from Transverse Optical Modes in Lithium Niobate. [R] . sussman, s. s. 1971

机译：铌酸锂中横向光学模式的可调光散射。

Electro-optically tunable microring laser monolithically integrated on lithium niobate on insulator

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