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The nitrogen concentration effect on Ce doped SiOxNy emission: towards optimized Ce3+ for LED applications

机译：对Ce掺杂氮浓度的影响SiOxNy排放:对优化Ce3 +领导应用程序

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摘要

Ce-Doped SiOxNy films are deposited by magnetron reactive sputtering from a CeO2 target under a nitrogen reactive gas atmosphere. Visible photoluminescence measurements regarding the nitrogen gas flow reveal a large emission band centered at 450 nm for a sample deposited under a 2 sccm flow. Special attention is paid to the origin of such an emission at high nitrogen concentration. Different emitting centers are suggested in Ce doped SiOxNy films (e.g. band tails, CeO2, Ce clusters, Ce3+ ions), with different activation scenarios to explain the luminescence. X-ray photoelectron spectroscopy (XPS) reveals the exclusive presence of Ce3+ ions whatever the nitrogen or Ce concentrations, while transmission electron microscopy (TEM) shows no clusters or silicates upon high temperature annealing. With the help of photoluminescence excitation spectroscopy (PLE), a wide excitation range from 250 nm up to 400 nm is revealed and various excitations of Ce3+ ions are proposed involving direct or indirect mechanisms. Nitrogen concentration plays an important role in Ce3+ emission by modifying Ce surroundings, reducing the Si phase volume in SiOxNy and causing a nephelauxetic effect. Taking into account the optimized nitrogen growth parameters, the Ce concentration is analyzed as a new parameter. Under UV excitation, a strong emission is visible to the naked eye with high Ce3+ concentration (6 at). No saturation of the photoluminescence intensity is observed, confirming again the lack of Ce cluster or silicate phase formation due to the nitrogen presence.
机译：Ce-Doped SiOxNy电影由磁控管沉积反应溅射CeO2的下一个目标氮活性气体的气氛。光致发光测量有关氮气流揭示大型发射光谱带集中在450 nm样本下沉积2 sccm流。起源在高氮的排放浓度。建议在Ce掺杂SiOxNy电影(例如乐队反面,CeO2, Ce集群,Ce3 +离子)不同的激活情况来解释发光。(XPS)揭示了独家Ce3 +离子的存在无论氮或Ce浓度,而透射电子显微镜(TEM)显示了没有集群或硅酸盐在高温退火。激发光谱(开业),一个宽的激发揭示范围从250纳米到400纳米提出了各种励磁Ce3 +离子包括直接或间接的机制。在Ce3 +浓度起到了重要作用排放通过修改Ce的环境,减少如果相体积SiOxNy和引起nephelauxetic效果。优化氮增长参数,Ce集中分析了作为一种新的参数。紫外线激发下,一个强大的发射是可见的肉眼Ce3 +浓度(高6%)。强度是观察,缺乏再次确认Ce集群或硅酸盐相的形成原因氮的存在。

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