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Retrieval of optical constants and thickness of thin films from transmission spectra

机译:从透射光谱中检索光学常数和薄膜厚度

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We discuss a new method to estimate the absorption coefficient, the index of refraction, and the thickness of thin films using optical transmission data only. To solve the problem we used a pointwise constrained optimization approach, defining a nonlinear programming problem, the unknowns of which are the coefficients to be estimated, with linear constraints that represent prior knowledge about the physical solution. The method applies to all kinds of transmission spectra and does not rely on the existence of fringe patterns or transparency. Results on amorphous semiconductor thin films and gedanken films are reported. They show that the new method is highly reliable. (C) 1997 Optical Society of America.
机译:我们讨论了一种仅使用光传输数据来估算吸收系数,折射率和薄膜厚度的新方法。为了解决该问题,我们使用了逐点约束优化方法,定义了一个非线性规划问题,其未知数是要估计的系数,其中线性约束表示有关物理解决方案的先验知识。该方法适用于各种透射光谱,并且不依赖于条纹图案或透明度的存在。报道了在非晶半导体薄膜和葛根肯膜上的结果。他们表明新方法是高度可靠的。 (C)1997年美国眼镜学会。

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