Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator

Yuejiao He; Lin Yang; Qing FangHongli XinFang LiYuliang Liu

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Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator

机译：隔热槽对马赫-曾德尔干涉仪型热光可变光衰减器性能的影响

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摘要

Two types of silicon-on-insulator thermo-optic variable optical attenuators (VOAs) based on a Mach-Zehnder interferometer and a multimode-interference coupler are fabricated, one with thermal isolating grooves to improve heating efficiency and the other without. Comparison of optical and electrical properties, such as insertion losses, the maximum attenuation levels and the corresponding power consumptions, and the response times, is carried out between the two types of VOAs. The comparison results indicate that use of thermal isolating grooves leads to better values for most characteristics and is an effective way to improve the performance of Mach-Zehnder interferometer-type thermo-optic devices.

机译：制备了两种基于马赫-曾德尔干涉仪和多模干涉耦合器的绝缘体上硅热光可变光衰减器（VOA），一种带有隔热槽以提高加热效率，另一种没有。在两种类型的VOA之间比较光学和电气特性，例如插入损耗、最大衰减水平和相应的功耗以及响应时间。对比结果表明，使用隔热槽可以提高大多数特性的值，是提高马赫-曾德尔干涉仪型热光器件性能的有效途径。

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来源
《Optical Engineering》 |2005年第4期|040504-1-040504-2-0|共2页
作者
Yuejiao He; Lin Yang; Qing FangHongli XinFang LiYuliang Liu;
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作者单位

Chinese Academy of Sciences Institute of Semiconductors Research and Development Center of Optoelectronics Beijing, 100083;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
variable optical attenuator; thermal isolating grooves; Mach-Zehnder interferometers; insertion loss; power consumption; response time;

机译：可变光衰减器;隔热槽;马赫曾德尔干涉仪;插入损耗;功耗;响应时间;

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Influence of thermal isolating grooves on the performance of the Mach-Zehnder interferometer-type thermo-optic variable optical attenuator

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