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Using a light microscope to measure motions with nanometer accuracy

机译：使用光学显微镜以纳米级精度测量运动

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摘要

A system for measuring nanometer motions of microscopic structures is demonstrated. Stop-actionimages of a target are obtained with a light microscope, CCD camera, and stroboscopic illuminator.Motions are determined directly from measured images using algorithms from computer vision. Theaccuracy of motion measurements using the system is assessed using a moving target with calibrateddisplacements. Accuracy is determined for specimens viewed under our most optimal conditions aswell as for a number of suboptimal conditions that illustrate important degradation mechanisms.Measured errors are compared to predictions based on computer simulations of theoretical models.Results show that the most important hardware factors include substrate vibrations and cameraimperfections. Measurement errors for the most optimal hardware conditions are primarily due tosystematic bias in the computer vision algorithms. For our most optimal conditions, the system canresolve motions as small as nanometers. Thus, errors in motion measurements are small compared toboth the wavelength of the light used to obtain the images and the pixel spacing of the videomicroscope.
机译：演示了一种用于测量微观结构纳米运动的系统。使用光学显微镜、CCD相机和频闪照明器获得目标的定格图像。运动是使用计算机视觉算法直接从测量图像中确定的。使用该系统进行运动测量的准确性是使用具有校准位移的移动目标来评估的。对于在我们最优条件下观察的试样以及一些说明重要降解机制的次优条件，都确定了准确性。将测量误差与基于理论模型的计算机模拟的预测进行比较。结果表明，最重要的硬件因素包括基板振动和相机缺陷。最佳硬件条件下的测量误差主要是由于计算机视觉算法中的系统偏差造成的。对于我们的最佳条件，该系统可以分辨小至纳米的运动。因此，与用于获取图像的光的波长和视频显微镜的像素间距相比，运动测量中的误差很小。

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