Phase-shifting method contrast calculations in time-averaged interferometry: error analysis

Krzysztof Patorski; Zbigniew Sienicki; Adam Styk

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Phase-shifting method contrast calculations in time-averaged interferometry: error analysis

机译：Phase-shifting method contrast calculations in time-averaged interferometry: error analysis

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摘要

Numerical simulations of the influence of the phase step miscalibration and average intensity changes between the registered frames on the time-averaged interferogram contrast calculated using the temporal phase-shifting (TPS) method are presented. The amplitude of sinusoidal vibration studied by the time-averaged method is encoded in the interferogram contrast or intensity modulation described by the zeroorder Bessel function. The properties of the TPS method used for contrast determination are established. Experimental studies of vibration mode patterns of silicon microelements with specular reflection surfaces provide corroboration of theoretical and numerical findings.

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来源
《Optical Engineering》 |2005年第6期|065601-1-065601-14-0|共14页
作者
Krzysztof Patorski; Zbigniew Sienicki; Adam Styk;
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作者单位

Warsaw University of Technology Institute of Micromechanics and Photonics 8 Sw. A. Boboli St. 02-525 Warsaw, Poland;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
optical testing methods; vibration studies; time-averaged interferometry; automatic fringe pattern analysis; silicon microelements;

Phase-shifting method contrast calculations in time-averaged interferometry: error analysis

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