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Retroreflective grating analysis versus physical measurements of surface contour

机译:Retroreflective grating analysis versus physical measurements of surface contour

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摘要

The technique of retroreflective grating analysis is presented to measure surface contour. This noncontacting optical method can detect a dent with maximum depth less than 10μm. A comparison with some physical measuring systems indicates that ithas advantage over such contacting measurements, especially for specular surfaces.

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