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White light interferometric surface profiler

机译:White light interferometric surface profiler

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摘要

We describe an optical system for 3-D profilometry based on the white light interferometer. Recentlymany different methods have been used to analyze the data obtained from white light interferometricprofilers. Many commercially available white light profilers are also in use today. We detail a simpleway to construct a profiler that uses two simple and efficient algorithms. It deals with the data in a fastand simple manner, thus reducing both the acquisition and analysis time. The system has atheoretically unlimited range and can profile both optically rough and smooth surfaces.

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