Deformation and shape measurement using multiple wavelength microscopic TV holography

U. Paul Kumar; N. Krishna Mohan; Mahendra P. KothiyalAnand K. Asundi

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Deformation and shape measurement using multiple wavelength microscopic TV holography

机译：Deformation and shape measurement using multiple wavelength microscopic TV holography

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摘要

Characterization of deformation and surface shape is an important parameter in quality testing of micro-objects in view of the functionality, reliability, and integrity of the components. Single-wavelength TV holography is widely used for deformation analysis. However, the single-wavelength TV holographic configuration suffers from overcrowding of fringes for large deformation that sets a limitation due to speckle decorrelation for quantitative fringe analysis. Furthermore, shape cannot be determined when using single wavelength. In this paper, we describe a multiple-wavelength microscopic TV holographic configuration that uses sequentially recorded phase-shifted frames at three different wavelengths before and after deformation of the specimen for evaluation of relatively large deformation fields at the effective wavelengths. Use of multiple wavelengths for deformation and shape evaluation is discussed. The design of the system along with the experimental results on small-scale rough specimens under static load is presented.

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来源
《Optical Engineering》 |2009年第2期|023601-1-023601-10-0|共10页
作者
U. Paul Kumar; N. Krishna Mohan; Mahendra P. KothiyalAnand K. Asundi;
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作者单位

Indian Institute of Technology Madras, Department of Physics, Applied Optics Laboratory, Chennai, Tamilnadu 600 036, India;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
multiple-wavelength microscopic TV holography; phase shifting; fringe analysis; MEMS testing;

Deformation and shape measurement using multiple wavelength microscopic TV holography

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