A simple technique for the replication of micro-optical elements is presented. Elastomeric material isused to realize a negative mold of the original optical element and UV-curing adhesive is used to makethe replicated copy. Replicated elements, such as refractive and diffractive micro-optical elements,are produced. The refractive microlenses have a diameter of 970 μm and a height of 79 μm andthe diffractive element is a multilevel blazed grating with a period of 64 μm. The characteristics ofthe replicated elements are measured using different methods. The deviation from a sphere of theoriginal and the replicated refractive microlenses is 0.13λ and 0.12λ root mean square (rms),respectively. The replicated multilevel blazed grating has a diffraction efficiency of over 80%. Analternative method for realizing planoconcave microlenses from a planoconvex master is alsopresented.
展开▼
