Fabricating Three-Dimensional Periodic Micro Patterns on Photo-Resists Using Laser Interference Lithography

Roessler Florian; Lang Valentin; Guenther DeniseLasagni Andres Fabian

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Fabricating Three-Dimensional Periodic Micro Patterns on Photo-Resists Using Laser Interference Lithography

机译：Fabricating Three-Dimensional Periodic Micro Patterns on Photo-Resists Using Laser Interference Lithography

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abstract_textpSpringtails are hexapods, which have a complex skin surface composed of periodically arranged mushroom-like features. This topography offers surface functionalities like non-wetting and preventing bacterial settlement. This study demonstrates a novel way of replicating the morphology of the springtail skin using interference lithography. The micro patterns are produced with an undercut contour in a multilayer resist system on Si-wafers consisting of a lower lift-off resist and an upper photo-sensitive resist. After irradiation, several developing and rinsing steps are carried out to produce cavities in the lift-off resist layer with an undercut geometry directly below the SU-8 top layer./p/abstract_text

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《advanced engineering materials》 |2017年第5期|共6页
作者
Roessler Florian; Lang Valentin; Guenther DeniseLasagni Andres Fabian;
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作者单位

Tech Univ Dresden, Inst Mfg Technol, George Baehr Str 3c, D-01069 Dresden, Germany;

Fraunhofer Inst Werkstoff & Strahltech IWS, Winterbergstr 28, D-01277 Dresden, Germany;

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原文格式 PDF
正文语种英语
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关键词
ELECTRON-BEAM LITHOGRAPHY; NANOIMPRINT LITHOGRAPHY; PHOTOLITHOGRAPHY; MUSHROOM; SURFACES; SILICON; SCALE;

Fabricating Three-Dimensional Periodic Micro Patterns on Photo-Resists Using Laser Interference Lithography

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